NVEPA|VEFseies

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

MK

G5-S M thread CV F Note 2) E Note 2) MVGQ CC I thread length J RB 4-G through 2 x 4-H counterbore J R + Clamp stroke Q + 2 x Clamp stroke depth 3 D-X Through-hole/Both Ends Tapped Common (Standard) (mm) 20H J Model K L F E C B A D G Q V P Yh9 Z N I M O R S T U X 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 1 8 1 8 1 4 1 4 0 0.062 0 0.062 0 0.062 0 0.062 MK2B32 MK2B40 MK2B50 MK2B63 54 61 73 86 34 40 50

Compact Cylinder with Solenoid Valve/

) EA M J F1 (KB) KA 2 x 2 x OB counterbore depth RB M Z X B + Stroke L EB A + Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8

High Pressure Coolant Valve

0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

1 ZQ 4 Lock nut 2 pcs. included for male thread mounting (Not included for female thread mounting) y ZR 5 Lock pin 6 Check valve ZB 7 Lock plate !5 ZA Replacement Parts ZX No. Description Part no.

Table of Contents

1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Component Parts Replacement Parts: Seal Kit (For double acting) Note No.

CQM

0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ARP IR-A IR Construction IRV VEX Working principle The compressed air from the air source passes from the IN side through the top of element y and flows inward. The compressed air that flowed in passes through the MC cartridge element provided inside element y , where all dust that is larger than 0.3 m is removed.

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

Compact End Lock Cylinder Series CBQ2

Y LX LZ 4-LD Bore size (mm) LS + Stroke A + Stroke LG LH LZ X Y LT LX LY 32 4 30 3.2 57 57 71 11.2 5.8 Rod end male threads 40 4 33 3.2 64 64 78 11.2 7 50 5 39 3.2 79 78 95 14.7 8 63 5 46 3.2 95 91.5 113 16.2 9 L1 Rod end nut Front flange type/CBQ2F, CDBQ2F (mm) Front flange type With rear lock With front lock Bore size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92

3 Position Cylinder Series RZQ

X Y X Y LS Full stroke LG LZ LX 4-LD 57 57 71 11.2 5.8 32 A + Full stroke 64 64 78 11.2 7 40 79 78 95 14.7 8 50 95 91.5 113 16.2 9 63 Front flange type/RZQF Flange (mm) FV M Bore size (mm) AR AH B FD FT FV FX 100.5 108.5 82.5 5.5 56 8 50 32 110 118 92 5.5 62 8 56 40 L B + Full stroke FX FZ AR + Full stroke 118.5 127.5 96.5 6.6 76 9 67 50 130 139 102 9 92 9 90 63 Bore size (mm) Rear flange

Pneumatic Positioner IP300/IP3100

Steel) 4w 1P300.1P3100 DIMENSIONS MODEL 1P300 (Lever Type) l t I I I J J O

IDX-OM-U010

Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W X y Z Repeated from A to Z in alphabetical order 1 2 3 4 o P Q R Repeated from A to Z in alphabetical order, with o assigned for January and Z for December. 1.2 Hazard classifications/ Hazard Warning Labels IDFC60/70/80/90 Series 1-4 IDX-OM-U010 Chapter

IDX-OM-W095

(REFRIGERANT) IDFC60-23 W R 0001 (2018 4 ) W R 0001 2017 2018 2019 2020 V W X Y A Z 1 2 3 4 o P Q R o 1 Z 12 IDFC60/70/80/90 Series 1-4 IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3

IDX-OM-V020

X y Z Q R 1.2 Hazard classifications/ Hazard Warning Labels IDFA60/70/80/90 Series 1-4 IDX-OM-V020 Chapter 1 Safety Instructions 1.3 Waste Disposal When you dispose of the product, you should collect the refrigerant and the refrigerant oil enclosed in the refrigerant circuit. CAUTION This product uses Fluorocarbon (HFC) as a refrigerant.

Compact

+X +Y X Y End deflection (when extended) + Non-rotating accuracy 5 Compact Cylinder with Linear Guide MXZ Series Mounting Bolt Mounting Bolt for MXZ When using through holes, use the mounting bolts from the CQ series. Refer to the following for ordering procedures. Order the actual number of bolts that will be used. Example) CQ-M3 x 25 L 2 pcs.

High Purity Fluoropolymer Needle Valve Series LVN 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part lists y Description No.