High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

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A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

SMC Basic Pneumatics

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Air Slide Table Series MXQ

(mm) B A 2 2.5 4 5 5.5 10 Model MXQ 6 (L) MXQ 8 (L) MXQ12 (L) MXQ16 (L) MXQ20 (L) MXQ25 (L) (1) 3 132

Table of Contents

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

ISO Cylinder

RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol: A29 Symbol: A28 DA 30 30 MM 30 MM L W W A L H A T AL A H Auto Switch Made to Order T MM H 118 C85/C75 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

CXS

L A93L 5m .

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Electric Actuator with Integrated Guide

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

GA R 2-RcP CDH9 J H MM D E e Width across flats G l 10 f 0.1 0.4 CX NB Air release Air release SS + Q + l + Stroke C NA T B U ZZ + Q + l + Stroke S + Stroke K F L MA A RR SS + Stroke ZZ + Stroke (mm) With rod boot Bore size (mm) Stroke range (mm) l J B C F GA GB NA NB P R S T CX CD RR SS U L e f Q 32 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22 38 52 21.5 15 25 to 1400 1/

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Air Cylinder NCQ7 Series Compact Cylinder

D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!1" Black D-F79F D-F7LF D-F7NTL o oiagnoslic ouipui OUT 2 o Series NCDQT Auta-Switch / Operating Range D-A72.

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D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!1" Black D-F79F D-F7LF D-F7NTL oiagnoslic ouipui OUT 2 o o Series NCDQT Auta-Switch / Operating Range D-A72.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Grease Volume Part no. 5 g GR-L-005 10 g GR-L-010 150 g GR-L-150 3. Do not wipe out the grease in the sliding part of the air cylinder.

17

With adjustment bolt With low/high load shock absorber + adjustment bolt (L/H unit) Standard piping type A unit L unit H unit Operating direction Side Front L R R R L L L R L Back Improved shock-less characteristics when a work piece is stopped.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol: A29 DA 30 MM MM DA 30 DA 30 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 84 Simple Specials Series CP96/C96 Symbol Change of Trunnion Bracket Mounting Position 2 -XC14 Series C85 Series

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

Compact Rotary Actuator Series CRQ2

l Center of rotation and center of gravity of the load are concentric. Gravity is applied. mg F l l mg Friction force is applied. Rotation shaft is vertical (up and down). 2 Ta = = t2 Ts = F l Gravity is applied in rotating direction.