High Vacuum Angle Valve switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.
type Table u Body option L Nil Without option S Dust-protected2 Cable Motor In-line motor type/D type Cable Table D Motor i Mounting3 o Actuator cable type/length Robotic cable [m] Nil None R8 84 R1 1.5 RA 104 R3 3 RB 154 R5 5 RC 204 Symbol Mounting R type L type D type Nil Without side holder V V H With side holder (4 pcs.)
Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !
-154 VS VS7 Contact SMC for S kit Except for L kit P.1.10-197 P.1.10-190 Contact SMC for S kit Except for L kit Standard P.1.10-192 P.1.10-197 1.10-113 SeriesVQ/Base Mounted: Variations SeriesVQ/Base Mounted: Variations Manifold Variations Kit P F Kit G Kit D-sub connector Flat cable connector Flat cable with power supply terminal block Conforming to MIL D-sub connector Conforming to MIL
d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.
B (S, R, RS) (-D) Stations When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.
D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.
other than above For P kit For J kit For L kit For S kit Note) The !
other than above For P kit For J kit For L kit For S kit Note) The !
Bore size (mm) Unit A H A A L H A L H A L H A L H Tightening torque MY1B80 Horizontal collision: P = 0.5 MPa 0.3 10 2000 1500 0.6 16 Collision speed (mm/s) Collision speed (mm/s) Air cushion Caution Use caution not to get your hands caught in the unit.
(mm) (2)
adapter*5, *6 E200-m01-D E200-m02-D E200-m03-D E300-m02-D E300-m03-D E300-m04-D E500-m06-D E500-m10-D p. 50 E300L-m01-D E300L-m02-D E300L-m03-D E400L-m02-D E400L-m03-D E400L-m04-D E600L-m04-D E600L-m06-D E600L-m10-D L-shaped piping adapter*5, *6 E200L-m01-D E200L-m02-D E500L-m04-D E500L-m06-D p. 51 E300T-m01-D E300T-m02-D E300T-m03-D E400T-m02-D E400T-m03-D E400T-m04-D E600T-m04-D E600T-m06
Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.
R R P B B B B B 21 7 35 17.5 A A A A A (DIN: 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in throttle valve (Station 1) (Station n) Max. 13.5 47.5 (Light/surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 24 18.5 B B (Pitch) P = 16 5.5 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D, Y) M8 connector (WO) 85.4 77.9 52.6 [59.6] M8 x 1 66.6 127 0.6
D, T S(1) S L, Z Refer to p.0-33 for Safety Instructions p.0-37 to 0-40 for common precautions.
C95 CP95 Center Trunnion Style: CA2TH NCM With rod boot Z + 1/2 stroke Z + l + 1/2 stroke 2-P (Rc, NPT, G) NCA 4-J MM Width across flats KA G G DTDe8 D TY E e -X H1 20AL B1 B C K A N F TT N Air release Air release 9 l f S + Stroke H Data h + l ZZ + Stroke TX TZ ZZ + l + Stroke Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA MM N P Without rod boot With rod boot 40 50 63 80
[1(P) SUP port] P = 10.5 34 20.5 VQZ The dashed lines indicate DIN rail mounting [-D] (with DIN rail mounting bracket).
Stroke H CM2 CM2 CM3 CG1 Width across flats KA Spring extend CG3 Effective thread length FL CD Width across flats B1 H1 P G NN Plug with fixed orifice JMB I MB D E CI MB1 MM AL A K CA2 F U L RR CX NA S + Stroke H + Stroke Z+1.2 0 + 2 x Stroke ZZ+1.2 0 + 2 x Stroke CS1 CS2 (mm) Bore size A AL B1 CD CI CX D E F FL G H H1 I K KA L MM NA NN P RR U 20 18 15.5 13 9 24 10 8 20 0 0.033 13 10.5 8