9.8

k Max. 28 V, 80 mA Residual voltage 2 V or less Analog voltage output Output impedance approx. 1 k The FUNC terminal is connected when using the copy function.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Digital Pressure Switch

output type-2 output Max. 80 mA Residual voltage 1 V or less T: Analog output 1 to 5 V Output impedance 1 k V: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type-2 output Max. 80 mA Residual voltage 1 V or less -Y (Copy

Digital Pressure Switch

output type-2 output Max. 80 mA Residual voltage 1 V or less T: Analog output 1 to 5 V Output impedance 1 k V: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type-2 output Max. 80 mA Residual voltage 1 V or less -Y (Copy

PSE530/200

Auto shift function (P. 16-3-17) Allows stable switch output even when supply pressure changes.

Transfer

(2-color indicator) 2-wire 12 V 24 V Grommet Yes Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 2-wire 12 V 3-wire (NPN equivalent) Reed auto switch Z76 IC circuit 5 V Yes Grommet 100 V Z73 IC circuit Relay, PLC 24 V 12 V 2-wire Z80 100 V or less Lead wire length symbols: 0.5 m Nil (Example) Y7BW 3 m L (Example) Y7BWL 5 m Z (Example) Y7BWZ Solid state auto switches marked

IDX-OM-N030

Reference [IDFA150F] For Option R GFCI PE TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 FM3 T SWL PLC TB2 Y0 1 MC1 Operation COM0 2 MC1 Y3 3 Y1 Failure MC2 COM3 PRS1 4 P X4 5 Remote control PRR COM1 X0 6 THR X1 THS3 THS2 THS1 X2 L Symbol Description N PRS2 PRS3 CM Refrigerating compressor X3 EDV PE OLR Overload relay P P MC1,2 Magnetic contactor 24V THR Thermal relay For Option V THS1,2,3 Thermostat

Digital Flow Switch (Manifold type)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Holding of accumulated flow (Integrated display type) A function to store the accumulated flow value in the products internal memory. The flow value will be stored at a set time interval of either 2 or 5 minutes.

VXA21/22

Options V Standard For vacuum, non-leak Select an option symbol with the "Applicable Fluid Check List" p.4.0-12 for a special fluid outside of standard.

Compact Cylinder

M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAVM9NA v v V v v IC circuit 3-wire (PNP) M9PAVM9PA v v V v v 2-wire 12 V M9BAVM9BA v v V v v Water resistant (2-color indicator) Water resistant type auto switches can be mounted on the

3-Position Rotary Table

12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

Low Differential Pressure Sensor

Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE303 PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k DC(+) DC(+) (Brown) (Brown) Analog output Load Analog output (Gray) (Gray) + + Main circuit Main circuit Main circuit Main circuit Main circuit Load OUT1 OUT1 12 to 24 VDC 12 to 24 VDC Load (Black

Slider Type/Ball Bushing Bearing

V Relay, PLC 2-wire IC circuit 5 V, 12 V 12 V 100 V or less 24 V Connector IC circuit 5 V, 12 V Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

2/3 Port Valve for Various

Note 2) Value on option V, M (Non-leak, Vacuum). Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

CRQ2

P-77 (YG)

Digital Flow Switch

PFMC7--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMC7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 Minimum load impedance: 50 NPN (1 output) + External input type PFMC7--GMaximum applied voltage: 28 V Maximum load current

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150