5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 33 3 Station table entries In the case

SZ3000

L2 5 (Rail mounting hole pitch 12.5) L1 (Station n).

LG1H

600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Plug-in Unit

L1 79.5 6.5 P=25 65.5 72 R4.5 46 Mounting hole for 2-M5 B A B A A A B A B A B A 9 A A A A A A A 143 163 42 80 34.5 R4.5 B B 9 B B B 55.5 SI unit 10 101 Stations D-side U-side 1 2 3 4 5 6 7 8 n Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2 = 25n + 192 n: Stations n L L1 L2 1 131 217 2 156 242 3 181 267 4 206 292 5 231 317 6 256 342 7 281 367 8 306 392 9 331 417 10 356 442

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4.

VQZ1000/2000/3000

L3 L4 2-7-20 Body Ported 21 21 Series VQZ1000/2000/3000 Plug Lead Unit: Manifold VQZ2000 28 (11) 20 (7.5) VV5QZ22Stations C (35) (5.5) 44.5 mounting hole DIN rail clamp screw n-C4, C6, M5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Grommet (G) n 5 Manual override VQC B 4 4 SMC SMC 2 A SQ (L4) (L3) L2 L1 5 18 P = 16 B 4 3 SMC SMC 2 A VQ0 B 4 2 SMC SMC 2 A B 4 VQ4

Shock Absorbers and Rate Controls

(onpressed (tbr.) 0tltll.5lllxl 0.75 1.0 l2-140 ?

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

B SMC A L1 Overall length of standard valve + L2 External pilot port position dimensions Series L1 dimension L2 dimension SY3000 41.5 6.5 SY5000 60.4 9 SY7000 71.9 9 JIS symbol Body ported 2 position single 3 position closed center X X B A B A EA EB P EA EB P 2 position double 3 position exhaust center X X B A B A EA EB P EA EB P 3 position pressure center X B A EA EB P 18

Rotary Actuator

Applicable shaft type: K X = X = X = Y = W2 = L2 = L4 = Y = [mm] [mm] [mm] Size Y W2 L2max L4max 30 8.5 to 25 1 to 2 Y-2 L2-2 50 10 to 36 1 to 5.5 Y L2-2 63 11 to 41 1 to 6.5 Y L2-2 80 13.5 to 50 1 to 8 Y L2-3 100 17 to 60 1.5 to 10.5 Y L2-4 Size X 30 3 to 25 50 3.5 to 36 63 3.5 to 41 80 4 to 50 100 5 to 60 Size Y 30 3 to 25 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A53 Note) Except

LX

Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Rolling Yawing 4 3 4 LXF Model Load movement direction a = 1000 2000 a Mep a = 2000 L1 (mm) Pitching Rolling Yawing a = 3000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 3 0 1 2 Transfer load m (kg) a = 1000 300 L2 (mm

VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A port (Pitch) (Mounting hole) (P , R port) 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) Stations n L1 L2 18 304 296 19 320 312 20 336 328 17 288 280 14 241 232 15 256 248 16 272 264 13 224 216 10 176 168 11 192 184 12 208 200 9 160 152 6 112 104 7 128

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Environment

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 LER Y 400 400 400 400 Mer m LEH 200 200 200 200 LEY -X5 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS 2000 2000 2000 2000 11LEJS Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 25AL3 Z 500 500 500 500 LEC 0

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

VQ7-6/7-8

Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202 3/4 L2 666 610 554 498 442 386 330 274 162 218 ( ): 3/4 Dimensions inside are for rubber seals. 3-10-28 29 ISO Standard

Table of Contents

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3 1 Air Suction Filter

VQ7-6/7-8

/2, 3/4 35 L: Dimensions Formula L n 10 9 8 7 6 5 4 3 1 2 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 120 232 176 Rc1/2 L2 640 584 528 472 416 360 304 136 248 192 L1 650 594 538 482 426 370 314 146 258 202 Rc3/4 L2 666 610 554 498 442 386 330 274 162 218 Dimensions inside ( ) are for Rc3/4 Dimensions inside

44

Width across flat Width across flat Effective area (mm2) Connection thread R A Weight (g) L1 L2 M d Model H1 H2 I.D.

3 Port Solenoid Valve Metal Seal Series VZ200 1

300 7 4 2-4.3 mounting hole With light surge voltage suppressor (Lead wire length) 17.3 31.4 VKF 2-M5x0.8 4-Rc 1/8 26 VQZ R side 49.5 VZ VS Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129 7 123 145 8 139 161 9 155 177 10 171 193 Symbol L1 L2 VFN Common exhaust: VV3Z2-S50 (Built-in One-touch fittings manifold) (G) (L) (M) (D) With light/