Electric Actuators

128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

IR1000/2000/3000

Recommended proper torque Nm (kgfcm) 1/8 1/4 3/8 1/2 Connection thread 7 to 9 (70 to 90) 12 to 14 (120 to 140) 22 to 24 (220 to 240) 28 to 30 (280 to 300) Winding direction Torque Expose approx. 2 threads Pipe tape Operating Environment Warning 1.

Air Catch Sensor

0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

Guide Table Series MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(lead wire length) 28.5 32 2.3 32 2.3 Max. 10 71.5 59 68 Applicable cord O.D. 4 to 6.5 Pg.7 29 mPm 27 50.5 58 63 25 2-3.5 (mounting holes) Manual override (non-locking) 27 0.5 0.5 P R 13.7 2-M5 x 0.8 (ports P, R) 24 See grommet type for other dimensions.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available

Vacuum Filter AFJ Series

drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No

Electric Actuator with Integrated Guide Series LTF

800 900 1000 36 LTF6EPH 4 to 500 to 390 40 LTF6ENH 8 to 500 to 390 44 LTF8FPL 12 to 1000 to 890 to 710 to 580 to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K

3 Way Direct Acting NVKF 300 Series

llmb0nilm $ffh$ IUUff 300 Electrical entry Grommet Lead wire length: 12inch (300mm) ' (H) Grommet lype with 24 inch leads is also available. Specialorder only. Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

VEX1

VEX AN AMC Effective area (mm2) Model Connection R(PT) Max.air flow (l/min) AMC310 300 3 8 16 55 165 330 550 AMC510 1,000 3 4 AMC610 AMC810 AMC910 3,000 1 1 6,000 10,000 1 2 2 99.9% of oil mist removal. Over 35dB noise reduction. Refer to p.5.3-1 for details. 5.1-36

NVKF

mption) sVA / 60H2. 7VA A / 60H2. 3.5VA i 4W (Standard), 2W (Low power ' At nted vollage and without lighl suge vollage 4.3W (Standard), 2.3W (Low oower consumption Y, W types) ' When applied at rated vollage ' Contact SMC for availability. llmb0nilm $ffh$ IUUff 300 Electrical entry Grommet Lead wire length: 12inch (300mm) ' (H) Grommet lype with 24 inch leads is also available.

NCA1

Bore size (in) Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 1.50 2, 2.50 3.25, 4 How to Order NCA1 Mounting Bore Stroke N XB7 Standard Ex: NCA1B 150-0400N-XB7 Low temperature Auto switch capable not available 6-15-24 24 Series NCA1 Oversized Rod Specifications 2 2.5 3.25 4 Bore

NCA1

Bore size (in) Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 1.50 2, 2.50 3.25, 4 How to Order NCA1 Mounting Bore Stroke N XB7 Standard Ex: NCA1B 150-0400N-XB7 Low temperature Auto switch capable not available 6-15-24 24 Series NCA1 Oversized Rod Specifications 2 2.5 3.25 4 Bore

Title not found

Step Motor Controller (Servo/24 VDC) Servo Motor Controller (24 VDC) Series LECP6 Series LECA6 I/O cable PLC Power supply for I/O signal 24 VDC Controller Please prepare PLC and 24 VDC power supply for I/O signal. Electric actuator/ Rod type To CN5 Options Controller setting software (Communication cable, USB cable and conversion unit are included.)

F

35 12 21 21 41.5/29.5 10 38 KQE10-03 M20x1 24 24 34.5 15 21 21 41.5/29.5 12 38 KQE12-03 M22x1 24 27 37 15 23 22 58.3/46.1 12 12 KQE12-04 M22x1 24 27 41 18 23 22 58.3/46.1 16 38 KQE16-03 M26x1.5 30 30 39 14 27 24 96(96) 16 12 KQE16-04 M26x1.5 30 30 41 18 27 24 113(96) P R O D U C T S E L E C T O R S T R A I G H T U N I O N : KQH (KQ2H) Use to connect tubes in the same direction.

Micro-Mist Separator with Prefilter Series AMH

OUT ~ 1-' ffi q=:J L ~I W ~ Drain (mm) Drain Model Port size A B AMH150 1/8,1/4,3/8 239 80 AMH250 1/4,3/8 252 80 1/2 258 284 AMH350 3/8,1 /2 290 80 (mm) 3/4 Connection Model AMH450 1/2,3/4 1 305 312 80 A 240 B AMH450 AMH550 AMH650 AMH850 3/4B,FF,10K lB,FF,10K 256 AMH550 3/4 ,1 339 80 260 300 349 1 1/2B,FF, 1 OK 2B,FF,10K AMH650 1,11/2 391 80 300 AMH850 11/2,2 540.5 80 380 496.5 SMC CORPORATION

0.1 MPa500 kPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple (p-p) 1% or lessqNo. of inputs: Up to 10 bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC

(p-p) 1% or lessqNo. of inputs: Up to 10 bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC Note 2)24 VDC (Max. 300 mA) with accuracy of 22.0 to 26.8 VDCq0 to 10 VDC (Output resistance