Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F

5 Port Solenoid Valve Series SQ1000/2000

How to Order Applicable Valves B C6 SQ 1 3 5 1 Y 1 Series SQ1000 C H G B A D F E A A A A B A B 2.PUSH 2.PUSH 1.TURN 1.TURN D Coil voltage Type of actuation A 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.

Booster Regulator Series VBA1110 to 4200 1

G H AV OUT port AU AF 4-12 mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15

,

capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F

XM, XY

FKM (Standard seal material) Principle materials Pilot pressure (MPa)(G) 0.3 to 0.6 0.4 to 0.6 Pilot port size M5 Rc 1/8 XMC 6.30 0.62 1.40 (1.76) 2.10 3.80 (5.16) 0.36 (0.40) Weight (kg) Note 2) XYC 7.80 0.67 1.42 2.50 4.50 Note 1) Conductance is the value for the molecular flow of an elbow having the same dimensions.

Air Cylinder

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

6, 10 Dual Rod Cylinder/Compact Type Series CXSJ 11-/1221-/22How to Order Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

A

x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

A 24 V100 M5 thread 8 deep, with or without insert depending on base material. SY 32 SYJ A' VK Coding stud.

Soft Start-up Valve AV2000/3000/4000/5000

x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10

Heavy Duty Stopper Cylinder Series RSH/RS1H

acting, Double acting spring, Single acting (Spring extended) Action Lever with built-in shock absorber type Style of rod end Air Fluid 1.5MPa Proof pressure 1.0MPa Max. operating pressure 10 to 60C (with no condensation) Ambient and fluid temperature RSH Not required (non-lube) Lubrication Rubber bumper Cushion +1.4 0 Stroke length tolerance Flange Mounting Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Nil A F J K M Rear flange surface Indicator Without indicator Pilot port direction Indicator Without indicator Pilot port direction Symbol Nil A F G J K L M Right flange surface Left flange surface Right flange surface Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

ZMA

Thread type Common EXH port size 04 1/2 Nil T F Rc NPTF G 06 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Indicate the ejector model no. below the manifold base no. Example) Manifold model no.: ZZMA04-SR (1 pc.)

AMPSeries

Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3

ITV

type 3m Right angle type 3m Without cable connector S L N Option Option Monitor output Bracket Thread type 0 None (for preset input) Analog output 1 to 5V DC Switch output/NPN output Switch output/PNP output Analog output 4 to 20mA Without bracket Flat bracket L-bracket B Port size Rc(PT) NPT NPTF G(PF) 1 2 N T 1/4 (2000, 3000) 3/8 (2000, 3000) 1/2 (3000) 2 3 4 C 3 Option 4 F

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

VPA4

x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm 5-3-26 3 Dimensions VPA4150-Bottom ported SA VA SA 4-Rc 1/8 pilot port (5-Rc 3/8, 1/2) 4-9 mounting hole (11) VA (Rc 3/4, 1) VM Courtesy of Steven Engineering,

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-57 2 Series AS-FM How to Order AS 2 2 0 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With seal M5 and U10/32 are not available with seal. Type 2 3 Elbow Universal Applicable tubing O.D.