3-Position Rotary Table

Weight Unit: g 10 20 30 50 Size Basic type 700 1300 1670 2570 High precision type 730 1400 1790 2730 Note) Excluding the weight of auto switches. Piping and Speed Conrol 1) A single 3-position pressure center solenoid valve or two 3-port solenoid valves are used.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

0.4

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly Pins 10P 16P 20P Cable length (L) Pins Cable length (L) 1.5 m 1.5 m AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 15P 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m 3 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 AXT100-DS15-2 Connector width (W) 5 m 17.2 24.8 30 AXT100-DS15-3 For other commercial connectors, use a type

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

IDX-OM-W026

MAKER MADE IN IDF Series i-2 i-5 IDX-OM-W026 i i-3 HFC IDF Series i-3 i6 IDX-OM-W026 i i-4 / 1 1.5 () IDF Series i-4 / i7 IDX-OM-W026 1 1 1-1 OUT IDF22E75E IN (ONOFF ) (EVAPORATING TEMP) 5-2 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30, IDF55E-30, AC200V IDF75E-30 AC200V L N PE L1 L2 L3 PE M3 M3 1.25-3 1.25-3 (6.5mm ) (6.5mm ) IDF Series 1-1 1 1 IDX-OM-W026 1 IDF22E75E OUT

Vacuum Pad

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

Sine Rodless Cylinder Series REBR Direct Mount Type

Contents Replacement parts: Seal kits 10 REBH15-PS Above numbers 29, 30, 31, 32, 33, 34, 35 15 REBH25-PS 77 Series REBH Construction/25, 32 Dual axis type/REBHT @0 !9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order ZSE20C(F) ISE20C(H) Option 2 A1 30 Bracket A (Rear ported) (Part no.: ZS-46-A1) 20 25 1.5 2.5 20 45 30 34.6 2 30 19 5.2 14.7 9.6 5.2 A3 Bracket C (Bottom ported) (Part no.: ZS-46-E) 50 1.5 47.7 17 12 40 4 x 4.5 6 30 30 20 20 60.5 2 15.7 1.5 30 ZSE20C(F)/ISE20C(H) Series Dimensions Panel mount

Series SY100 3 Port Solenoid Valve Rubber Seal

Example: 2000mm lead wire length 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Connector housing Hook For AC SY114-1LO SY100-30-1A-20 For DC SY114-5LO SY100-30-4A-20 Lead wire 2.1-2 3 Port Direct Operated Rubber Seal Series SY100 Model Weight (g) (2) Vacuum application (MPa) Effective area (mm 2) (Cv) R port P port Operating pressure range (MPa) Model Actuation

Series VCS

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Operating angle Hysteresis angle Model MDSU1, 3 110 10 MDSU7, 20 90 Auto switch Table B port A port Positioning pin hole 11-5-30

ZR

0 Refer to page 13-3-7. Refer to page 13-3-22. Refer to (4) below. ZR1-FZ (30 m) t Note) ZSE2-OR-15Note) Precautions on handling the filter case 1. The case is made of polycarbonate.

RSH/RS1H

40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

RSH/RS1H

40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Free 150/30 Dust proof 3 Position closed center 3 Position closed center B A B A P R R P R 3 Position exhaust center 3 Position exhaust center B A B A Solenoid Specifications P R R Grommet(G)/(H), L type plug connector(L), M type plug connector(M) P R Electrical entry 3 Position pressure center 3 Position pressure center DC AC50/60Hz 24,12,6,5,3 100, 110 , 200, 220 10% rated voltage 0.5(

Guide Table Series MGF ø40, ø63, ø100 1

(4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) MGF63 Load weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200

IDX-OM-M051

freezing . 2 9 2 3 1 Drainage of the facility water circuit . 2 9 2 4 Reinstallation of the product . 2 9 Table of Contents 1 IDX-OM-M051 Air Dryer Table of Contents Chapter 3 Start and stop 3 1 Before Starting . 3 1 3 2 Start . 3 1 3 3 Stop . 3 2 3 4 Precautions for restarting operation . 3 2 3 5 Check items after starting . 3 2 3 6 Display of controller . 3 3 3 7 Signal output. 3 4 Chapter

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50