Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Compact Type Dual-Rod Cylinder Series CXSJ

mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Cable length Power supply voltage Cable entry direction Left entry 2 3 4 5 2m 3m 4m 5m 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right Left Top Bottom Axial entry Right entry Bottom entry Specifications 100 5.4 200 6.1 300 6.9 400 7.7 500 8.5 600 9.3 5 to 40 (with no condensation) 5 24 300 700 10.0 900 11.6 1000 12.4 800

High Vacuum Angle Valve, XL Series

1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa = 145 psi

Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Safety Instructions

Supply voltage Internal voltage drop of switch Voltage of operation load > Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

VND

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Body material: Bronze, Stainless steel VXA Cylinder actuation by external pilot air VN LVC LVA Large valve capacity PTFE seal LVH LVD LVQ LQ LVN Wide variations TI/ TIL 2 types N.C., N.O.

VNH

VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping Caution VX3 When high temperature fluids are used, use fittings and tubing with heat resistant features. (Self-align fittings, Teflon tubing, Copper tubing, etc.)

Interface Regulator for VQ4000 5 Port Solenoid Valve

1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035

ZCUK

D-A9V D-M9V D-F9WV Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ( ): Denotes the values of D-M9V, D-F9WV.

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Enclosure: IP65

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: w/Connector

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector:

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 150mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental, Pulse

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 150mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: L (Foot), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A2 (LECSA2-S, 200~230V Incremental