Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8

CQ2

Standard (mm) A Without auto switch B P A B P Q Q With auto switch Bore (mm) 5st 10 50 20 5st 10 33 20 5st 10 20 5st 10 20 5st 10 60 20 5st 10 43 20 32 40 50 RC(PT) 1/8 28 40 M5 X 0.8 50 38 11.5 11 10.5 11 RC(PT)1/8 10.5 11 RC(PT)1/8 46.5 34.5 56.5 44.5 56.5 39.5 66.5 49.5 RC(PT)1/8 RC(PT)1/4 78.5 50.5 10.5 10.5 88.5 60.5 10.5 68.5 40.5 68.5 50.5 RC(PT)1/4 C D E H I J K

CV/MVGQ

-15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1

CV/MVGQ

22 Up to 300 17 32 26 RS Q G 45 5.5 37.5 M26 x 1.5 13 34.5 76.5 15 6 M10 x 1.25 19.5 12 22 Up to 300 17 32 26 0 0.033 50 7 46.5 M32 x 2 16 42.5 84.5 21.5 8 M14 x 1.5 21 14 24 Up to 300 22 41 32 0 0.039 RS H A Z TZ TY TX TT TD S QY Q ZZ Bore size (mm) 20 25 32 40 RZQ 52 32 32 10 8 62 14 19.8 118 108 60 40 40 10 9 62 14 22 122 112 MI W S 60 40 40 10 9 64 16 25.8 124 114 77 53 53 11 10 88 16

Battery-less

Vertical Mounting, Sliding Bearing q 70 mm stroke or less w Over 75 mm stroke 100 100 LEYG32M E/40M E Load mass m [kg] Load mass m [kg] LEYG32M E/40M E LEYG16M E 10 10 LEYG25M E LEYG16M E LEYG25M E 1 1 0.1 0.1 10 100 1000 10 100 1000 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Ported Type 11 Bottom Ported RoHS How to Order Manifold SS5Y S 10 3 NA C6 N 05 U Refer to page 11 for Type 11/Bottom ported dimensions. q r w t e y u i o q Series y P, E port entry t Valve stations 3 5 U D B In the case of the 32-output SI unit SY3000 SY5000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 24 stations) Symbol 02 Stations Note 2 stations w Type Double

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 10 mm 10 mm 10 mm 10 mm Model With shims 10 to 13 mm 10 to 13 mm 10 to 13 mm 10 to 13 mm CKQG CLKQG CKQP CLKQP Workpieces to be clamped should not be thicker than those shown in the table. 5. Clamp only the flat side of a workpiece. 6.

Rotary Actuator/Vane Type

D-M9m m: Operating range Size q m: Operating range q d: Hysteresis range 10, 15 170 20 20, 30 100 15 40 86 10 Actuated position: ON Auto switch d: Hysteresis range OFF D-S/T99(V)m, S9P(V), S/T79, S7P, D-97/93A, 90/90A, R73/80m (OFF) Magnet Size q m: Operating range q d: Hysteresis range 10, 15 110 10 20, 30 90 40 52 8 Note) Since the figures in the above table are provided as a guideline

Table of Contents

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

Hydraulic

Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) M8 x 1.25 9.5 depth 5.4 20 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 M10 x 1.5 9.5 depth 5.4 25 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 M12 x 1.75 11 depth 6.5 32 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 M16 x 2 14 depth 8.6 40 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 M20 x 2.5 17.5 depth 10.8 50 71 60 11 28 24 24 8 58 11

One-touch Fittings Series KQ2

22.5 15.5 9.6 17.5 10 2.5 25.5 24.5 13.7 15.4 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32UNF 12.7 2.3 9.3 15.6 1 16 22 11.11 5 32 23 16 1 8 1 4 10.4 10 18 3 26 25 14.29 KQ2L05-32 10-32UNF 20 22 2.3 11.11 11.4 10 19.5 3 16 1 8 1 4 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 24 26 16.5 3.5 14.29 10-32UNF 2.3 18.1 13.6

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Air Cylinder Series CM2

Q H H1 K KA MM N NA NN P QY S TD TT TX TY TZ Z ZZ B2 I D G Bore size -X 8 1 20 18 41 5 6 15 24 14 62 8 10 32 32 52 36 103 13 5 28 26 8 M8 x 1.25 M20 x 1.5 15.5 19.8 8 1 25 22 22 45 5.5 8 15 30 14 62 9 10 40 40 60 40 107 17 6 32 10 M26 x 1.5 M10 x 1.25 33.5 19.5 Individual -X 8 1 32 22 9 45 5.5 10 15 16 64 9 10 40 40 60 40 109 17 6 32 12 M26 x 1.5 M10 x 1.25 19.5 37.5 34.5 25.8 4 1 40 24

Electric Actuator/Slider Type

Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] 500 500 500 Mey m 0 0 0 0 4 2 6 8 10 5 10 15 20 0 0 10 20 30 L5 Work load [kg] Work load [kg] Work load [kg] 10 Series LEFS Table Accuracy A side B side Traveling parallelism [mm] (Every 300 mm) Model q C side traveling parallelism to A side w D side traveling parallelism to B side q LEFS25