Soft Start-up Valve AV2000/3000/4000/5000 1

1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Speed Controller with

1 i y u q o !0 !1 i y Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Stainless steel 303 6 U-seal HNBR 7 Spacer PBT 8 Cassette 9 Seal NBR 10 O-ring NBR 11 O-ring NBR L-Bracket DIN Rail Mounting Bracket q w e q Component Parts Component Parts No. Description Material 1 Bracket Steel strip No.

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Vacuum Pad

Stroke (M) Buffer specification Symbol Stroke 20, 25 35, 50 10 10 mm V V 20 20 mm V V J Rotating K Non-rotating Specifications Pad diameter Buffer specification Stroke [mm] Tightening torque [Nm] Mounting Spring reactive force [N] At 0 stroke At full stroke 20, 25 J/K 10, 20 2.5 to 3.5 M10 x 1 1.0 3.0 35, 50 J/K 10, 20 6.5 to 7.5 M14 x 1 2.0 5.0 Precautions Be sure to read this before handling

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Fluoropolymer Piping Equipment

2" x 3/8" LQHB 4 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 12 x 10 TL TIL 10 x 8 TLM TILM 6 x 4 4 10 x 8 6 x 4 12 x 10 6 x 4 3 x 2 TD TID TH TIH 3/4" x 5/8" 19 x 16 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/8" x 0.086" 5 12 x 10 10 x 8 12 x 10 10 x 8 10 x 8 8 x 6 6 x 4 10 x 8 12 x 10 3/4" x 5/8"

Compact Cylinder

46 5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10 x 1.5 88 6.5 16 8 56 5.5 1/8 14 76.5 15 80 10 to 50 49 40 55 46 21 22 89 12 M14 x 2.0 113 9 19 9 70 9 1/4 14 98 19 100 10 to 50 56 46 62 52 21 26 109 12 105.5 M16 x 2.0 134 12.5 22 10 85 9 1/4 19 118 19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height

Wireless System

0 1 0 A 14 A B A 14 A B A B A 14 A B A 14 A B 3 2 3 2 A 14 U side D side D side U side 0 1 0 1 5 4 5 4 2 3 2 3 B 12 B 12 B 12 B 12 B 12 7 8 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-DXPD 1 set EX600-DYPB 1 set EX600-WSV1 1 set EX600-EU1 1 set SS5Y3-10S6WS72-05B-C6 (Type 10 5-station manifold base, Wireless slave) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit:

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

Micro-Mist Separator with Prefilter Series AMH

37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm) Accessory AMH850 0: With auto drain (N.O. type) For AMH850 a: 3/88 female thread Optional Specification LL 0 T: With element service indicator 75 .

High Purity Fluoropolymer

4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 21 1/8" 25 11.5 10 10 Class 1 31.5 1/8" 35 16.5 14 15 14 L 29 1/4" H (A) W M 36.5 1/4" 1/4 42.5 23 19 20 17 (E) Port size 36 3/8" Class 2 to 5 R (NPT) 46 3/8" 52 28 23 24 21 44 1/2" M H 55 1/2" 62.5 39 32 29 26 53.5 3/4" 72 3/4" 25 1 81 49 46 39.5 36 71 1" Class 6 Inch sizes Connection threads Rc/NPT Model Applicable tubing O.D.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Class Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Class Applicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/

VCB

) 2 port solenoid valve 1/4 (8A) 3 3/8 (10A) CAC406 (SUS) FKM (EPDM) 1/2 (15A) 1/4 (8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) OUT IN Viewing the graph To generate a water flow of 5l/min at a differential pressure of 0.1MPa, an effective area with Cv factor 0.35 (VCB , 3) or more is required. 3 4 100 VCB 10 Cv = 2.1 3 4 VCB 7 Cv = 1.38 3 4 VCB45 Cv = 0.85 VCB22 Cv = 0.16 10 Flow rate Q l /min

MXQ

1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Power Clamp Cylinder

2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !0 Socket head cap screw 105 C CKZN-D050 Note 2) 120 B w Stopper bolt r Bumper !1 Seal washer 135 A 50 CKZN-B050 Note 2) CKZN-D050 CKZN-B050 CKZN-K050 Note 2) q Switch actuator o Spring washer !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Electromagnetic Digital Flow Switch

Lead wire color *1 q q DC (+) 1 Brown w N.C./IN 2 Not used e DC () 3 Blue r INPUT 4 White (Flow sensor 1 to 5 V input) e w 1 2 3 4 r *1 When using the lead wire and M12 connector included with the LFElJ series. Do not connect black. Power supply/output connection lead wire Cable Specifications Pin no.

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10