AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL CL1 MLGC #1 @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction $6 #2 #7 #3 #4 #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

HRX-OM-W038

9.3.1 HRS040-A-20-(BJMTWZ) . 9-5 9.3.2 HRS040-W-20-(BJMTW) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS040--20-(BJMTWZ). 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS040-A-20-(BJMTWZ) . 9-7 9.5.2 HRS040-W-20-(BJMTW) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS040--20-(BJMWZ) . 9-8 9.6.2 HRS040--20-T,-MT . 9-8 HRS Series HRX-OM-W038 Contents 9.7 Required facility water flow (For water-cooled type) . 9-

HRX-OM-X037

Alarm Notifications and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Operation of this product when an alarm occurs . 7-1 7.3 Troubleshooting . 7-2 7.3.1 Alarm contents, causes, and troubleshooting . 7-2 7.4 Other Errors . 7-5 HRL Series HRX-OM-X037 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection

HRX-OM-X071

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

Proposals for Energy Saving

7 !9!8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

HRX-OM-O021

9.3.1 HRS050-A-20-(BJM) . 9-5 9.3.2 HRS050-W-20-(BJM) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS050--20-(BJM) . 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS050-A-20-(BJM) . 9-7 9.5.2 HRS050-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS050--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-O021 Contents 9.9 Sample DoC. . 9-

HRX-OM-R005

9.3.1 HRS060-A-20-(BJM) . 9-5 9.3.2 HRS060-W-20-(BJM) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS060--20-(BJM) . 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS060-A-20-(BJM) . 9-7 9.5.2 HRS060-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS060--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-R005 Contents 9.9 Sample DoC. . 9-

High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Title not found

z 1 . 7 a x.43 o 1 ) 2.24 (58) M26x1.51 5 7 a40) c 9 8 125\ 4.96 (126\ 1.42 140 l;$?'

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Note 3) Not offered in 7/8", 1 1/4", or 2" or with rod boot. Note 4) Double acting only. Note 5) Not available as standard with C, R mount, with rod boot. Note 6) See specifications for standard and maximum stroke lengths. Note 7) Rubber cushions are offered at no additional cost on 7/8" and 1 1/4". They are options on the other bore sizes.

SV

Refer to page 1-7-4.)

SYJ3000/5000/7000

Refer to page 1-7-4.)

VFS

station 7 station 7 station 7 station Max. 8 stations Max. 8 stations Max. 8 stations Max. 8 stations Note 1) Maximum stations are 8.

SMC Pneumatic Clean Series

Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.

Modular F.R.L. Units

*7 *7 *7 c Pressure unit Z*6 Name plate and caution plate for bowl in imperial units: psi, F *7 *7 *7 *7 *7 *1 Drain guide is NPT1/4. *2 Drain guide is G1/4. *3 A bracket is not assembled and supplied loose at the time of shipment.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing