Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

KJ

d (inch) Applicable tubing O.D.

T

(mm) 12 3.2 4 6 8 10 D Tubing I.D.

Cylinder

F UJ ' r-, ~\\ _ \. / r\ o .-: . <-III o ~ \ ~ r c-~~ ~ d" -, Rod end without L --' thread r~ \ A~OSW'tCh MM 8 NN LZ --' l S (Across H at) .. s .I w J 2051 3Gst 1561 I (mm) ,5 st lost ~ 1551 sst l. l0S" 20" 1.30>1. P .

10

D-G

•

D-PH9L(iZ) D-PH1L(Z) Wjring system DC3wire system AC2-wire system D-PH9 Source voltage 12, 24 VDC D-PH9L (Z) ~ ~ ) ,-~,Red Current consumption 16mA or less Output Load voltage 1OVDC-28VDC 80VAC-130VAC r--'r-~ White Load current 100mA or less BOmA or less Zener diode Internal voltage drop tOOmA O.6V or less S

2/3 Port Valve

e, r are for selection of valve composition.

Rotary Actuator NCRA1 Series Single Rack and Pinion

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

VCC

Description C-w D-t C-t D-o F-e D-e D-r O-ring between manifold blocks VVCC12-OR-1 Special FKM O-ring 1 1 set unit VV2CC1 VV3CC1 VVMCC1 (common) 4 One-touch fitting One-touch fitting 1 VVCC12-50A-L1C4 1 set unit 6 One-touch fitting O-ring HNBR 1 VVCC12-50A-L1C6 O-ring O-ring Special FKM 1 1 set unit VVCC12-OR-3 O-ring Special FKM 2 O-ring assembly between port blocks VV3CC1 VVMCC1 1 set

Title not found

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

NCRBIBwserbs

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

Air Cylinder CLA Series Fine Lock Model

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

3 Port Solenoid Valve

D End Plate> SS070A012A Replacement Parts No. 9 No. Description Material Number < D Side End Plate Assembly > 3 D side end plate assembly No.

Title not found

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

Soft Start-up Valve AV2000/3000/4000/5000 1

4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

V Basic type (B)/CJ5BS NDn8 GA GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 MM NN CA CB D F NA NB A With head cover port in axial position (R) BB H BA S + Stroke Z + Stroke (mm) Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 16 15 18 18 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 R

Table of Contents - Tubing

Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.