VXD21/22/23

N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

CXT

(NA) (NA) Q+Stroke MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG d Bore (mm) Standard stroke (mm) Slide Ball bushing (N) (NA) PA* PB PW Q A E F G GP H HG HN HP HT L MGC 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 00 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 MGF * PA dimension is the center sorted factor

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

r ITVX IN (Inlet pressure) OUT (Outlet pressure) IN (Inlet pressure) OUT (Outlet pressure) PVQ VEF VEP q q VER e e VEA Figure 2 Backflow Figure 1 Normal VY1 VBA VBAT AP100 When the inlet pressure is higher than the set pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

r ITVH IN (Inlet pressure) OUT (Outlet pressure) IN (Inlet pressure) OUT (Outlet pressure) ITVX PVQ q q VY1 e e VBA VBAT Figure 2 Backflow Figure 1 Normal AP100 When the inlet pressure is higher than the set pressure, the check valve w closes and operates as a normal regulator (Figure 1).

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Table of Contents

3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

MQQ

L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5

Micro-Mist Separator with Prefilter Series AMH

Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187

WRF100

Contents q Cover L (1 pc.) w Cover R (1 pc.) e Top covers (2 pcs.) r Hexagon head bolts (4 pcs.) t Flat washers (4 pcs.) y Cover mounting bolts (8 pcs.)

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

CEx-OMQ0010

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Micro Mechanical Valve Series VM1000

Combination possible: Combination impossible: Construction Side ported Bottom ported R port 3 port only R port 3 port only w t e u Non-actuated Non-actuated w t e u q q i Port 1 Port 2 y r y Port 2 Port 1 r Actuated Actuated Force Force Port 1 Port 2 Port 2 Port 1 Component Parts No. Description Material Note 1 Valve ZDC White coated No.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

VCHC ASR ASQ 669 AS-FG Series Construction Elbow type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread e e !0 o q o !0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

7

CKGA80, 100/CKPA80, 100/With Magnetic Field Resistant Auto Switch (Rod Mounting Type) 1 P3DWASC CK G A 80 Y Built-in standard magnet type with magnetic field resistant auto switch 100 Built-in strong magnet type with magnetic field resistant auto switch 100 P79WSE CK P A 80 Y Built-in standard magnet Number of auto switches Nil S 2 pcs. 1 pc.

DOC1003626

Broken communication wire monitoring time. o r coming 60 sec. off AL34 Communication alarm is generated.

Free-Mounting Cylinder with Air Cushion Series CU

4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

AR Series Modular Type Regulator

0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) AV Inlet pressure (MPa) AR40-A/AR40-06-A AF 0.3 0.25 Outlet pressure (MPa) Set point 0.2 0.15 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 453 AR10-A to AR40-A Series Construction AR10-A AR20-A to 40-06-A t e t e q IN OUT IN OUT r r q w w Component Parts No.

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014