(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

Magnet: None, Mounting: MP1, Double Rear Clevis, Bore Size: 3 1/4", Stroke: 12", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: None, Mounting: MX0, Basic, Bore Size: 3 1/4", Stroke: 12", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: Built-in, Mounting: MP4, Single Detachable Rear Clevis, Bore Size: 1 1/2", Stroke: 12", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: Built-in, Mounting: MF2, Rear Flange, Bore Size: 3 1/4", Stroke: 12", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: Built-in, Mounting: MP1, Double Rear Clevis, Bore Size: 2 1/2", Stroke: 12", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: None, Mounting: MS2, Side Lug, Bore Size: 2 1/2", Stroke: 12", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

42

0 200 400 600 800 1000 1200 1400 VQ4l5l (Plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Flow rate [L/min(ANR)] ARBQ4000-00-P (P B) 0.7 Dimensions 0.6 Outlet pressure [MPa] 0.5 0.4 SMC 0.3 0.2 59 50 147 0.1 B 2 SMC 1400 0 0 200 400 600 800 1000 1200 12 1 P 5 3 R2 R1 Flow rate [L/min(ANR)] PE 4 A 55.5 Pressure Characteristics 25 218.5 Conditions Inlet pressure: 0.7 MPa Outlet pressure:

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 0 300 50 250 200 150 100 300 600 450 300 750 1200

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series

HRX-OM-W002

1600/1800 1000/1200 1600/1800 2000/2400 2500/3000 Heating capacity(50/60Hz)4 W 400/500 450/500 550/700 Temperature stability 5 0.1 0.13(at 7L/min)/0.18(at 7L/min) Pump capacity (50/60Hz) 6 MPa For option T : 0.42(at 10L/min)/0.4(at 14L/min) 0.13at 7L/min/0.18(at 7L/min) For option MT : 0.32(at 10L/min)/0.32(at 14L/min) For option -T/MT0.36at 7L/min/0.42(at 10L/min) For option T1 : 0.28(