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-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved This pamphlet is printed on recycled paper with concern for the global environment. 1st printing GR D-036 P-400(N) Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

1 3 Port Air Operated Valve Series VPA3145/3165/3185 How to Order SA 04 4 5 1 VPA3 VA Thread type SA VPA Air operated valve Nil Rc G NPT NPTF F N T VA 1 Number of pilot VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 03 (3/8)

F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

With One-touch fitting Thread type Applicable tube outside diameter (OUT) Metric size 1/8 (male thread), M5 x 0.8 (female thread) 01 Port size (IN) R, Rc NPT Nil N ARJ310-01 4mm 6mm 04 06 Accessories None Bracket Pressure gauge Nil B G Inch size ARJ310F-N01 5/32" 1/4" 03 07 Model Port size IN Note) Model OUT Rc 1/8 NPT 1/8 4 One-touch fitting 6 One-touch fitting 5/32 One-touch fitting 1/4

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: B (w/Bracket), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: B (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 03 [Screw-in (Port Size 3/8)], Nozzle: 03 (Male Thread, KN-R02-200)

Piping: 1 (Bottom Direction), Body Color: W (Urban White), Piping Type: N (NPT), Connection Size: 03 [Screw-in (Port Size 3/8)], Nozzle: 03 (Male Thread, KN-R02-200)

Piping: 2 (Top Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 03 [Screw-in (Port Size 3/8)], Nozzle: 03 (Male Thread, KN-R02-200)

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 03 [Screw-in (Port Size 3/8)], Nozzle: 03 (Male Thread, KN-R02-200), Nozzle Cover: CF (Nozzle Cover/Fluororubber)

Piping: 2 (Top Direction), Body Color: W (Urban White), Piping Type: N (NPT), Connection Size: 03 [Screw-in (Port Size 3/8)], Nozzle: 03 (Male Thread, KN-R02-200), Nozzle Cover: CF (Nozzle Cover/Fluororubber)

Valve: None; Stop Valve: None, Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.