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(October 1999) Vacuum ejector system Manifold ZZQ108A-B S C-A (1) (2)(3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 1) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 1) If the standalone product does not have the energy saving function, select

Z type: +COM only) Rated voltage 24, 12 VDC/100, 110 VAC Note) The withstand voltage specification for the wiring unit section conforms to JIS C 0704, Grade 1 or its equivalent.

Option Note 1) Nil D C Without option With lock mechanism With cancel cap Axial direction (tube) Note 1) Options can be combined. Indicate the part No. according to the priority order of D.C.

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/

Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 51 52 53 57 44 45 45 49 12 12 16 16 16 16 20 20 46 52 64 74 8.5 9.5 10.5 14.5 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 59 67 82 96 2 3 2 3 14 14 17 17 7 7 8 8 32.5 38 46.5 56.5 5.5 5.5 6.6 6.6 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 9 9 10.5 10.5 14.5 14.5 13.5 15.5 11 11 15 15 5 5 5 5 1 1 1.6 1.6 15 17 17 17 32 40

Rc C2SF-2J-A G Rc C2SF-2-A G NPT C2SFN-2J(Z)-A NPT C2SF-2(Z)-A -11- Option symbol C Note 1) C Note 1) Semi-standard symbol 6 C 6C Semi-standard: "C" Standard Port thread type Part No. Semi-standard: "-" Standard Port thread Part No. type Rc AD27-C-D G Rc AD27-D G NPT AD27-C(Z)-D NPT AD27(-Z)-D Appearance and part No. Semi-standard: "6C" Standard Port thread type Part No.

MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

Rc C2SF-2J-A G Rc C2SF-2-A G NPT C2SFN-2J(Z)-A NPT C2SF-2(Z)-A -11- Option symbol C Note 1) C Note 1) Semi-standard symbol 6 C 6C Semi-standard: "C" Standard Port thread type Part No. Semi-standard: "-" Standard Port thread Part No. type Rc AD27-C-D G Rc AD27-D G NPT AD27-C(Z)-D NPT AD27(-Z)-D Appearance and part No. Semi-standard: "6C" Standard Port thread type Part No.

P611070-1 P611090-1 P611060-1 P611080-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P611010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Model CRB2BWU10 CRB2BWU15 CRB2BWU20 CRB2BWU30 CRB2BWU40 CRBU2WU10 CRBU2WU15 CRBU2WU20 CRBU2WU30 CRBU2WU40 Unit part no.

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

Body Ported Plug Lead Unit Connector Kit How to Order Manifold Series VV5QZ 1 2 08 C DIN rail mounting None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO VQZ1000 VQZ2000 VQZ3000 1 2 3 (1) Note 1) Order DIN rail separately.

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

. 10-1 10.3 CONNECTION OF POWER SUPPLY. 10-2 Chapter 11 Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter

2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 1-YNM5 MA3 1-YNM5-R1 MA3 1-YNM5-R2 MA3 1-YNM5-R3 MA3 1-YNM5-R4 MA3 1-YNM5-R5 MA3 1-YNM5-S6 MA3 1-YNM5-R6 MA3 0-AM3 MA3 0-AM5 500 MA Air pressure port 6 x M5 x 0.8 10 11 D35 AHC unit (Double Acting) Electrical contact points: 12 14 15 580 20 24 41 25 250 Tool adapter 270 751 Series MA3 With D-sub connector MA3-YM5Robot adapter MA310-C D-sub connector

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

size (mm) 25 32 40 09 11 14 09.5 16.0 15.0 120 150 180 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 PA 060 080 100 NW 60 74 94 P PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 SS 5.1 4.0 9.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 ZZ XX 38 48 54 Bore size

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Configuration Minimum equipment and wiring requirements to get started Provided 1 Ex) 200 V AC (*1) by customer 5 6 Provided 1 by customer 7 2 3 (-) PC 1 2 (+) 8 4 C D 11 21 9 11 U 2 Electric Actuators Ex) LEF V W 3 Provided by customer 10 (Positioning unit/Motion controller) (*1)Refer to LECSS Operation Manual, Chapter 3 if the power supply voltage is 100VAC. 1 Driver LECSS*-S* 2 Motor cable