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:'11 \ooOD I . ., 1 ;' Nlodo6 ~~ " BK; :t.laXQ7 E :MijXOB y P.;pglicable tube, 0.0 G H 1>1;1 <0 . El 4 5 g ZPY2O!' 20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...)

Digital Flow Switch (Integrated display type) ( compatible)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

ITV

) 71 12 ITV IC E REGULATOR P C M S VBA MPa ITV10 0.005~0.5MPa 0~10VDC OUTPUT INPUT VE Exhaust port Rc1/8 M3 x 0.5 Solenoid valve EXH GY MADE IN JAPAN VY1 Solenoid valve EXH OUT 2 G EXH (3) OUT (2) SUP (1) G 19.5 11 PPA AL (Optional) P3020114 Flat bracket 40 Port size 2 x Rc1/8, 1/4 Mounting hole 4 x M4 x 0.7 thread depth 6 mm through L-bracket OUT 2 G R3.5 15 25 7 22 2.3 45 (10) 30 (Optional

MONOSASHI-KUN WITH BRAKE CONTROLLER

Program Setting 9-2-1 Input Method 9-2-2 Confirmation of Input Data 9-3. Selection of Dip Switch 10. Driving 45 10-1. Setting of Origin Direction 10-2. Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1.

Cylinder with Turntable Series MGT

14 18.5 10 13 17.5 D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Compact Cylinder

Port aperture Switch model D-M9(V), M9W(V), A9(V) A Bore size (mm) A (Mounting groove number) B (Mounting groove number) C (Mounting groove number) D (Mounting groove number) (2) (2) (2) 32 D B (2) (2) (2) 40 Diagram seen from the piston rod 50 (2) (2) (2) C 63 (2) (2) (2) Operating Range Auto Switch Mounting Auto switch model Bore size (mm) 32 40 50 63 D-M9, D-M9V D-M9W,

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Series IDG

Note 2) Note 2) Flow direction (rightleft) R S Standard equipment With dew point indicator In case of two or more options, indicate them in an alphabetical order.

Manifold Specifications

In the case of base mounting, 2(A) port of 3 port valve should be 2(B) port of manifold base.

3 Port Solenoid Valve Series VQ100 1

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

3 Port Solenoid Valve Series VQ100 1

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

IDX-OM-U010

. 10-1 10.3 CONNECTION OF POWER SUPPLY. 10-2 Chapter 11 Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter

VQ

Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.

REC

40 60 40 204 150 to 700 20 MTS 42.5 M26 X 1.5 32 159 9 10 40 40 60 40 217 150 to 1000 22 51 M32 X 2 40 181 10 11 53 53 77 44.5 247 200 to 1000 26.5 CC REC T/Rear trunnion H2 TDe9-0.025 -0.061 2-Rc(PT)P 2-NN G Relieving port Relieving port Width across flats B1 Relieving port M5 X 0.8 G Standard port Standard port H1 I 2-Eh8 TY D MM AL lNA TT K A TX TZ N N F S+Stroke H 40 Z+Stroke ZZ+Stroke

Vacuum Manifold for fieldbus system

Component Parts for Manifold (5) (6) (2) (9) (1) (7) U side (4) (10) (8) (11) Plug for individual supply Tightening torque: 0.6 Nm D side (3) No.

VM

Applicable tube Lock nut thick 2, across flats 14 2.5 mm P.T. 2.0 mm O.T. 4.5 mm T.T. 5-6-11 10 2/3 Port Mechanical Valve Series VM100 Compact size. Piping options: Side piping, Bottom piping A variety of actuator types.

VQ7-6/7-8

800) 258-9200-www.stevenengineering.com Y(PE) port 1/8 153(166) 141(154) SMC 108.5(121.5) 23(30) (A, B port) Y 12 50(63) 38(53) 5 3 32(42) 38(53) 23(30) 1 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port 2-3/8, 1/2, 3/4 X(PE) port 1/8 P port 30(42) 30(42) 10 (11) A, B port ( ): 3/4 2 position double : VQ7-8-FG-D double (Reverse pressure): VQ7-8-YZ-D 3 position closed center : VQ7-8-FHG-D exhaust

Rotary Actuator/Vane Type

2 CRQ2 No.

HRX-OM-Z002

14.5 to 18.5 Rc1/2 Communication cable entry Electric wire diameter 6.5 to 10.5 Facility water outlet port Rc1/2 Circulating fluid outlet port(CH1) Rc1/2 Facility water inlet port Rc1/2 Drain port Rc1/4 Caster with stopper Fig. 2-2 Name of each part Table 2-2 Accessories Operation Manual 2 copy (English 1 pc. / Japanese 1 pc.)

SMC Wireless System PROFINET compatible

2 Base byte 2 System diagnosis 3 DY#B (Unit 2) byte 3 System diagnosis 4 Reserved byte 4 DX#D (Unit 1) byte 5 EX600-WSV# (Unit 0) Base Valve output: 32 points byte 6 Reserved Remote (Wireless channel 001) byte 7 Reserved DY#B (Unit 3) byte 8 DX#D (Unit 1) byte 9 Reserved DY#B (Unit 3) byte 10 Remote (Wireless channel 002) byte 11 Reserved Remote AXA (Unit 2) (Wireless channel 001) byte 12