IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

HRX-OM-O021

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

SQ1000/2000

Nil M MB Note 1) For the double solenoid specification, the symbol for Function is "D". Note 2) Only rubber seal types are applicable.

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2001FM-04-X12 Ex.) AS2001FM-04-X21 AQ Note 1) Not particle-free ASV Throttle Valve (Without Check Valve) X214 AK Ex.) AS2001FM-04-X214 VCHC ASR ASQ Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

HRX-OM-W032

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Fluoropolymer Piping Equipment

1/2" 3/8" 23 LQ1B35-M 8 5.5 9 29 LQ1B4B-M 3/8" 5.8 LQ1B36-M 6 3.6 LQ1B39-M 10 1/8" 18.4 29 21.9 4.4 4.4 LQ1B310-M 8 4.4 6 24 9 18 21 43 28 10 LQ1B4C-M 1/2" 1/2" 24.5 32 9 LQ1B4D-M 3/8" 5.8 LQ1B4G-M 1/2" 1/4" 27.5 7 29 14 28 26 54 33.5 39 6 6 LQ1B41-M 12 3/8" 23 9.4 29 LQ1B5A-M 3/4" 1/2" 30.5 LQ1B42-M 10 7.4 10 10 38 6 24 9 18 21 43 28 10 LQ1B5B-M 1/2" 9 LQ1B43-M 12 1/2" 24.5 32 9.4 LQ1B5C-M

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

3 Port Air Operated Valve Series SYJA300 1

Also, take measures to prevent ingress of water and foreign matter from the breathing port of the diaphragm. 5-5-10 1 3 Port Air Operated Valve Series VGA342 How to Order SA 04 VGA342 A VA Port size Passage A Normally closed (N.C.) B Normally open (N.O.) Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O.

VCC

PA PA PA PA PA IN IN PA IN RETURN IN RETURN IN RETURN IN 646 Valve for Water and Chemical Base Fluids VCC Series How to Order Manifold 02 VV CC1 G M 06 C4 04 With gate valve Passage number Gate valve and cleaning valve mountable number 2 port valve, Cleaning valve 2/3 port valves mixed mounting 2 M 02 04 06 Cleaning valve (2 port valve): 1 pc. + Gate valve: 1 pc.

ASR

Note3) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

Series AS-FM/AS-M/ASD-FM

Speed Controller for Low Speed Operation Series AS-FM/AS-M/ASD-FM In-line Type Dual Type In-line and dual types newly introduced!

Suction Filter with Case FH99 Series

(Including O-ring for element) FH FH With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N