3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details

Suction Filter with Case FH99 Series

Common with L-type threaded and flange L-type flange Nominal filtration 074 105 149 74 m 105 m 149 m Port size (Outlet side) 04 06 08 10 12 16 20 24 28 32 1/2B 3/4B M Micromesh Element Differential pressure indication 1B 0 4 5 None Differential pressure indicator Differential pressure indication switch Note) 1 1/4B 1 1/2B 2B Hydraulic fluid 2 1/2B Note) N.C. and N.O. common 0 1 2 N W V Petroleum

FQ1

sealing method Options Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Note) Specity seal material in place of "" (N for NBR or V for FPM). 4.

AC Servo Motor Driver (MECHATROLINK-III type)

Meaning When Parameter Classification Enabled n.1 [Factory setting] Inputs the Forward Run Prohibited (P-OT) signal from CN1-7. Pn50A n.8 Disables the Forward Run Prohibited (P-OT) signal. Allows constant forward rotation. After restart Setup n.2 [Factory setting] Inputs the Reverse Run Prohibited (N-OT) signal from CN1-8. Pn50B n.8 Disables the Reverse Run Prohibited (N-OT) signal.

Actuator Position Sensor

Deactivated 1: LEDs blinking 0x00CC (204) 0 R/W Find Me Unit 8 bit 0 N with 1 Hz (227) 0 R/W Notification Enable Unit 8 bit 0 Y 0: All enabled 1: All disabled 0x00E3 Travel distance [mm] 30: out of measuring range Position bit(8) 16 bit N 1 R Position of magnet 0x00E5 (229) 2 Position qualifier bit(0) 8 bit N 1 Measuring range start bit(16) 16 bit Refer to P.22 Y 0 to 4000 Range start end

IDX-OM-W022

PE 3 2 1 PE L N TB ILS ILS TDR MC MC TDR TDR MC MC TDR PTC MC OLR OLR MC PTC CM MC MC CM MC TDR TDR MC C11 PRS FM1 FM1 PRS P P C12 FM2 FM2 MOV MOV For Option M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI GFCI For option R For Option R Operation Failure TB L N PE 1 2 3 Operation Failure TB L N PE 2 3 1 TDR MC ILS TDR MC ILS TDR MC OLR EDV PTC MC 01 For Option M CM MC TDR MC OLR PTC FM1 PRS

VDW Series

Refer to pages 11 and 12 regarding manifold additions. 8 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 Dimensions (mm) 1in = 25.4mm VV2DW2 15 ( 25.5) 1 11 Approx. 300 16 4.6 1 24 33 (19.5) 19.5 R2.3 2-1/4 (IN port) 9 4.5 L1 (: Thread type) L2 L3 1 Stations D side 2 3 4 5 n U side VDW23-*G-* VDW23-*G-* VDW23-*G-* VDW23-*G-* 68 31.5 21 18.5 n-M5 x 0.8 n

AC Servo Motor Driver (MECHATROLINK-II type)

Meaning When Parameter Classification Enabled n.1 [Factory setting] Inputs the Forward Run Prohibited (P-OT) signal from CN1-7. Pn50A n.8 Disables the Forward Run Prohibited (P-OT) signal. Allows constant forward rotation. After restart Setup n.2 [Factory setting] Inputs the Reverse Run Prohibited (N-OT) signal from CN1-8. Pn50B n.8 Disables the Reverse Run Prohibited (N-OT) signal.

IDX-OM-W020

8-1 8 1 IDX-OM-W020 8 K AD48-8-A-X2112 1 IDFB6E15E-**-K AD48N-8Z-A-X2112 1 IDFB6E15E-**N-K KQ2H10-02AS 1 IDFB6E15E-**-K 10R1/4 KQ2H11-35AS 1 IDFB6E15E-**N-K 10NPT1/4 IDF-S1926 1 1) IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDFB Series 8-2 8 2 IDX-OM-W020 9 R 9 R 9-1 9-2 IDFB4E 15E-11-R 15A 30mA 9-3 IDFB Series 9-1 9 1 IDX-OM-W020 9 R IDFB4E to 11E 0.37inch (9.5mm) L N PE

TCU

Part No. 1 3 to 90 N X 8 31 TCU0425l -1-N-X6 L X 5.9 + 200 L X 5.2 + 200 1 3 to 90 N X 4 18 TCU0805l-1-N-X6 8 5 TCU0425l -2-N-X6 42 N X 8 L X 4.4 + 200 L X 3 + 200 2 3 to 90 N X 16 2 3 to 40 28 4 2.5 TCU0805l-2-N-X6 TCU0425l -3-N-X6 52 N X 12 3 3 to 63 L X 2.9 + 200 1 3 to 45 L X 5 + 200 N X 10 28 TCU1065l-1-N-X6 10 6.5 L X 5.3 + 200 L X 3 + 200 N X 6 24 1 3 to 90 52 2 3 to 35 N X 20 TCU0604l

Manifold Specifications

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Applicable connector: 9 Triangle mark indicator position EXH outlet Flat ribbon cable connector (20P) (Conforming to MIL-C-83503) Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity

15

Technical Data Refer to page 1494 for detailed selection procedure. 1493 CY1S Series Calculation of Guide Load Factor The selection calculation finds the load factors (n) of the items below, where the total does not exceed 1. Item Load factor n Note Examine m. mmax is the max. load mass for Va. 1 = m/mmax 1: Maximum load mass Examine M1, M2, M3.

Manifold Specifications

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

C95Series

Piston gasket N SA !II 18* Cylinder lube qaskel N SA Piston Aluminum alloy Cushion valve Steel wire Nickel plated 1 9 Snap ring Steer for spring ~40~ 1 00 ,.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

Compact

torque shoutd be O.OS to 0 . 1 N m .

S070

(SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6 83.2 10 86.8 90.4

Booster Regulator/Air Tank

port 3/8" Tank OUT port 3/8" Inspection port 3/4" (With plug) ARJ VBAT05A(N)1-E-X105 VBAT05S(N)1-E-X105 Safety valve (Supplied with product) AR425 to 935 Booster regulator IN port 1/4" Booster regulator IN port 1/4" Safety valve port 1/4" ARX EXH: 1/4" EXH: 1/4" (370) (370) OUT OUT AMR (307) (307) 257 60 Inspection port 150 148 163 ARM 4 x 11 4 x 11 32 32 3/4" (With plug) ARP 100 100 200