42 28 0.60 (0.68) Closed center Metal seal VQ530 5 0 11 0.24 2.6 11 0.23 2.8 50 53 70 0.65 (0.73) Rubber seal VQ530 5 1 12 0.33 3.4 13 0.37 3.7 60 63 63 0.58 (0.66) VQ5000 1/2 Exhaust center Metal seal VQ540 5 0 12 0.13 2.9 14 0.18 3.4 50 53 70 0.65 (0.73) 3-position Rubber seal VQ540 5 1 14 0.39 3.9 16 0.35 4.5 60 63 63 0.58 (0.66) Pressure center Metal seal VQ550 5 0 12 0.23 2.9 13 0.24 3.3
Proper tightening torque (Nm) Tightening Torque for Piping Connection thread 7 to 9 12 to 14 22 to 24 28 to 30 Rc Rc Rc Rc 1 8 1 4 3 8 1 2 5. Piping to products When piping to a product, refer to the operation manual to avoid mistakes regarding the supply port, etc. Back page 5 5 Port Solenoid Valves Precautions 4 Be sure to read this before handling.
(Red Green Red) Auto switch model D-M9NJ D-M9PJ Output type NPN PNP Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 25 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less Leakage current 100 mA or less at 24 VDC Indicator light Operating range . Red LED illuminates Optimal operating range .
Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.
A B 50 5 5 22 28 A B 50 5 5 M14 x 1 M8 x 1.25 Gasket M8 x 1.25 Gasket M14 x 1 Width across flats 21 Width across flats 21 50 4 50 4 4.5 4.5 Dimensions Dimensions Part no.
Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 1939 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes (Double Action Type) Series VHS4510/5510 Model When in the exhaust position, the valve may be padlock secured. This prevents erroneous operation.
28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 , , 1
The outside drawings show the single vane type, but only the position of the chamfered sections shown in the above drawings differs from single and double vane. 11-5-28 28 Rotary Table: Basic Type Vane Style Series MSUB These drawings indicate the condition when the B port is pressurized.
RE A B 0.2 53 REC 67 CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC 4-6.6 through 8-11 depth of recessed area 5 Load carrying direction MK(2) 12 3 RS Q G 28 13 6 10.3 6 RS H A RZQ 12 Conveyor lower limit position MI W S 1 3 R25 CEP1 CE1 Stroke 73
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZZ + Stroke RHC A D E F GA GB H I JC JD K LD LH H1 H2 10 Bore size (mm) Stroke range (mm) Eff. thread length MK(2) 8 5 25 7 5 30.5 43 26 44 47.5 53.5 16 18 14.5 15.5 20 Up to 700 8 6 28 7 5.5 25.5 39 31 48 49.5 56.5 16 22 18 19.5 12 25 Up to 700 RS Q
-N through MU T EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2 x 2-RA L M Flat washer Data W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Bore size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A 26.5 B 17 B 22 12 16 20 25 M4 x 0.7 8-32UNC 4-40UNC M3 x 0.5 25 24 5 3 32 31.5 5 to 30 4-40UNC M4 x 0.7 8-32UNC M3 x 0.5 5 to 30 26.5 17 31.5 22 29 28
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting
A2 10 11 12 17 Model A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 Graph (2) Allowable Moment Coefficient: Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Allowable Moment Coefficient: Note) 16 mm for MXF8-10 only. 0.7 Stroke (mm) Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model 10 0.56 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98
AR425 to 935 ARX AMR Winding direction ARM Sealant tape Expose approx. 2 threads ARP Recommended Proper Torque [Nm] Connection thread 1/8 1/4 3/8 1/2 Note) IR-A IR-A Torque 7 to 9 12 to 14 22 to 24 28 to 30 Note) Tightening force for connecting to the EXH port of IR301 2 -A is 8 to 10 Nm. Operating Environment IR Warning IRV 1.
5 VDC or less, Current consumption: 5 mA or less) Connected to +24 VDC (Voltage: Between 19 VDC and power supply voltage, Current consumption: 5 mA or less) Input signal Static electricity removal completion signal Maintenance detection signal Error signal Sensor monitor output Note 3) Max. load current: 100 mA Residual voltage: 1 V or less (Load current at 100 mA) Max. applied voltage: 28
36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41 40 + Stroke 45 Bore size [mm] Weight Reduction rate % CDQ2 JCDQ Weight Volume 40 290 g 201 g 31% 35% 50 455 g 332 g 27% 28%
However under Japanese regulation, only MPa is available in Japan. 0 600 psig/bar 1) 6 10 20 40 4.1 MPa 7 MPa 14 MPa 28 MPa 1000 psig/bar 1) 2000 psig/bar 1) 4000 psig/bar 1) 1) Under Japanese Measurement Law, this gauge should not be used in Japan.
HRLE090-Wm-m Approx. 20 Refer to Facility water system in the specifications on pages 10 and 12. 28-1 A HRLE Series Specific Product Precautions 4 Be sure to read this before handling the products. Refer to the back cover for safety instructions.
Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 9 Water-cooled Refrigeration pp. 25, 27, 28 Specifications Operation Display Panel p. 29 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 10 Alarm p. 29 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 11 Communication Functions pp. 30, 31 VOptions HRR012/018 How to Order With Electric Conductivity
950 1000 Product weight [kg] 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33 7.61 7.89 8.17 8.45 8.75 9.01 9.29 9.57 9.85 10.13 Additional weight with lock [kg] 0.53 517 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28