Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Individual -X 1649 Series MVGQ Low Power Consumption 0.5 W Mass #$ %&$ # $ '($ )) *%&$ + ' $ )) Solenoid Specifications Power consumption (W) 12 MVGQM12 Coil rated voltage (V) !"

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

VS7-6

Unit/Specifications Air filter (w/auto-drain, w/manual drain) 5m Filtration Regulator 0.05 to 0.85MPa Set press.

IS1000

0 IS1000 No. q w e r t y u i o !

With Factory Installed

( 01, -02 and -03 after model no. means port size{01 1/8,02' 114,03 3/8,04 1/2} 5 Filter I Regulator Series AW e How to Order AW 01 Filte~ Regulator '-Optional specifications 0.02~0.2MPa 1 (0.2 ~ 2.0kgf/cm2) setting Accessory (optional) 20 1/8 Type of thread Body size _-1 2 Metal bowl 6 Nylon bowl Description Applicable model Symbol 8 Metal bowl with level gauge ~ ~ ~ ( pn 0 (Only AW3001

EXxx-OMO0027

5 6050:01 Channel 0 6050:02 Channel 1 6060:0 (No input data allocation) Slot 6 60A0:0 Diag.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

AR Series Modular Type Regulator

w Component Parts No.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

Table of Contents

-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0

VFM300

Brass Brass Notes i Description Material Pilot body Body Metallic plated Valve seat (B) Valve seat (A) Metallic plated Black zinc chromate w e o !0 Head cover r Spool valve assembly Zinc alloy Brass, NBR Valve !1 Stainless steel Valve spring t Aluminum alloy End cover Metallic plated !2 Stainless steel Return spring y Polyacetal Piston !

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

VFM300

0 w e Valve Valve spring Return spring Spool spring Head cover r Spool valve assembly NBR ZDC !1 Stainless steel t ADC End cover Metallic plated !2 Stainless steel y POM Piston !

Fieldbus system EtherCAT compatible SI Unit

50x2:0 2 Under range error 2 UNSIGNED8 Number of Channels 50x2:01 2 50x2:04 Channel 0 2 Channel 3 Enum081C 0=No error 1=Error 50x3:0 Over upper limit error UNSIGNED8 Number of Channels 50x3:01 50x3:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 50x4:0 Under lower limit error UNSIGNED8 Number of Channels 50x4:01 50x4:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 1: x = Unit

Process Pump

Power consumption reduced 0.45 W 0.35 W CE compliant (Built-in solenoid valve/PB1011A) Check valve is resistant against foreign matter. Flow passage around the check ball is enlarged and improved for better resistance against foreign matter. Longer life [Life is 1.5 times longer than the current product.]

25

Power consumption reduced 0.45 W 0.35 W CE-compliant (Built-in solenoid valve/PB1011A) Check valve is resistant against foreign matter. Flow passage around the check ball is enlarged and improved for better resistance against foreign matter. Longer life [Life is 1.5 times longer than the current product.]

HRX-OM-M005

drain port (Rc3/8 w/ valve and plug) switch Level Sub tank switch Sub tank drain port (Rc3/8 w/ valve and plug) Refrigerant pressure gauge Water regulating (high) valve Facility water outlet (Rc1/2 w/ plug) * The water regulating valve is used for each channel.

ML1C

LP-01 ML1C LC-01 25 32 40 Series Mounting position A B ML1C 177.5 128.5 152.5 123.5 147.5 172.5 D-M5 D-M5W D-M5T Lead wire cap Lead wire clamp Auto switch 14 11 Lead Wire Clamp/Lead Wire Cap (Option) 22 22 B A Lead wire clamp Lead wire cap Series LC-01 LP-01 ML1C (mm) 25 32 40 Mounting position Series A B 124.8 148.8 173.8 ML1C 113.2 137.2 162.2 Minimum Stroke for Auto Switch Mounting Operating

Pressure Switch/Reed Switch Type

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003