Valve Type: 33 (N.C. Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: T (NPTF)

Valve Type: 33 (N.C. Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: F (G)

Valve Type: 33 (N.C. Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: F (G)

Valve Type: 33 (N.C. Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]

CC

RHC Low IY Low High Work load/Allowable moment MK(2) W RS Q G Model IX IY W H Sectional secondary moment Low noise (Slide screw type) RS H A Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 70 122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Slider guide: 47 dB (LJ1S) Slide screw + Linear guide: 53 dB (LJ1H) RZQ MI W S

Hydraulic Cylinders

B (mm) C d D H B Part no.

C95Series

Variations JISSymbol r---r::==,..,-, [~jH+H+H+H+H 1"1 1 JISSymboi 10 -at 1~ II I I I I[ I I I I I I I1 I1~ Ie [~ I I I I I I I I I I I I I I I M~ JISSymbol __ rad ~ IeICIIK . Note) Standard sttllke for C95 9Elrles 1 5 below 700 I Without auto switch capability With auto switch capability Buill-in magnetT Made 10 order 2 pes.

CQS

For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 100 Air slide table MXP/MXPJ6 11221122Dimensions: MXP6 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 11-/22MXP6-5 W AA H 7 4 depth 2.5

LX

Direct acting guide H When using both auto and proximity switches, list the proximity switch part number after the auto switch part number. Example) F9N1G2 AC servomotor Motor type A 6 6 pcs.

IDX-OM-W014

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

socket head plug) EY HA GB EH KC KH H GB GA HB G GA N N KW A Z + Stroke Adjustment bolt GD GC Model Standard stroke EB A EA EH ES EW EY G GA GB GC GD H HA HB HW CY1F10 49 10 16 7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After replacing the actuator, be sure to conduct a test run before actually using the product. 8-16-23

Dedicated Controller

F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller. LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Suction Filter with Case FH99 Series

W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95

SMC Pneumatic Clean Series

(Refer to Front matter 23 "Particle generation measuring method"and Front matter 24 "Comparison of cleanliness standards" for details.)

15

92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10 x 1 87 18.5 13.5 32 111 23 CY1SG25-Z RJ1412LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 99 90 42 4.5 9 16.5 21.5 M14 x 1.5 96 18.5 13.5 32 111 44 -X CY1SG32-Z RJ2015HN M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 50 3 5.5 11 91 18.5 24.5 M20 x 1.5 116 18.5 12.5 31 134 46 CY1SG40-Z RJ2015LN M8 x 1.25 Rc1

3

Through-hole/Both ends tapped common (Basic) S T R Q H (Rod size) AE (Rc, NPT, G) (2 locations) (Port size) E effective thread depth F Yh9 Z X 5.5 (The dimension on the opposite side is the same.) I (4 locations) 0.1 0.2 D G W AC (4 locations) (The dimension on the opposite side is the same.) A AA C J L L J K (4 locations) Flat washer With 4 pcs.