Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

10-SV4000 40 or less 40 or less 82 or less 3 position exhaust center 2(B) (A)4 2(B) (A)4 2 position single 2 position double 3 position (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 4 position dual 3 port valve 3 position pressure center Note) Based on dynamic performance test, JIS B 8375-1981 (Coil temperature: 20C, at rated voltage) 2(B) (A)4 2(B) (A)4 Weight (EA)5 3(EB) 1 (P) (EA)5 1 (P) 3(EB

MU

Fig. (6): MU63 Allowable Load for Rod End 7-8-2 3 Plate Cylinder Double Acting, Single Rod Series MU 25, 32, 40, 50, 63 How to Order CUJ Without auto switch MU CU B 25 30 D M CQS MDU B 25 30 D M J79W S With auto switch CQM CQ2 Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

JA/JAH/JB/JS

A R Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

CNS

B 1181 Class 2 M14 x 1.5 22 DJIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 160 -X 20Adjustment 1) [Horizontal] Caution Forward Data W SOL.A SOL.B SOL.C Action 1.

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

VQ4000

35 16 15 ARBQ4000-00-B A EA 18 40 40 Effective area at exhaust side (mm2) S at P2 = 0.5 MPa 0.7 Outlet pressure (MPa) 0.6 B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the solenoid valve.

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

40 8.5 M3 X 0.5 Finger closing port M3 X 0.5 Finger opening port 9.5 25 25 Finger opening port M3 X 0.5 M3 X 0.5 Finger closing port C MHZ2 3-3 depth 6 +0.02 0 (A, B, C common view) 44 MHZJ2 29 9h9 0 -0.036 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ 15 4.7 9.7 MHL2 1 2 5.8 3 4.7 MHR 2-3 (36.5) 33.5 MHK 19.5 2-4.2 MHS 2 10 3e8 -0.014 -0.028 Auto switch mounting groove Open: 11 Closed

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

Thermo-chiller

Applicable model Dimension in [mm] A B C HRS100/150-A-20/40-A 32.7 [830] 11.9 [302] 61.1 [1552] HRS100/150-W-20/40-A 22.4 [570] 15.8 [401] 53.5 [1353] C 118 A B Option symbol With Earth Leakage Breaker B HRS 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.

MXW Series Long Stroke Slide Table

25 40 40 40 Y Y 10 6H9 +0.03 depth 5.5 0 41 160 Taper thread plug with hexagonal hole 10.5 Operation direction B A 9.5 11 24 24 16 12.5 A 30.5 60 50 32.5 A Cross section AA (scale 40%) Z 5-M6 x 1 thread depth 12 4 x H G H 7 depth 5.5 6H9 +0.03 Bottom through hole 5.1 0 F E 6H9 +0.03depth 5.5 0 Model E F G H Z 87 168 75 48 337 MXW20-100 91 185 79.5 52 362 MXW20-125 Note) Adjuster bolt Y shown

15

40.

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before