COQ2BP

Foot , u Flange Clevis Moun~ 50 CQ-L050 CQ-F050 CQ0050 f~ ",,~~.~ 50 25, 30, 35, 40, 45, 50, 75, 100 ..63 CQ-L063 CQ-F063 CQ0063 63 25. 30. 35, 40, 45, 50, 75, 100 . 60 " CO-LOBO CO-FOeD CO-DOSO Notes. If foot bracket is required, order 2 pcsIcylinder.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

WRF100

Switch mounting bracket Note 2) 0.2 25 25 13 Fulcrum 12 12 20 10 10 2 x M10 x 1.5 through 45 F 30 90 110 107 Note 3) 2 x 4 x M10 x 1.5 depth 12 70 0 2 x 2 x 8H7( ) depth 12 0.015 1 193 25 52 380 (58.7) 95 133 70 0.05 (70) 85 75 270 0.3 (173) Rc1/ 4 (10) 100 100 Unclamp side port (30.2) (30.2) 306 139 360 Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

PFMB.eng

Flow setting (3 step setting mode) Function setting (Function selection mode) Other functions [1000] 1000 L/min (PFMB7202) [F 1] OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. [ 10] 10 L/min (PFMB7201) [ 25] 25 L/min (PFMB7501) Do not use the product for flammable fluid. Fire or explosion can result.

Air Fittings Fitting Series For Special Environment

O e p u t ) h c n I ( . n i M e l o h . a i d d a e r h T F N U l e d o M H ) . x e H ( D L A M . t W ) f g ( 4 / 1 1 / 5 6 8 1 0 0 7 0 E R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 6 . 0 ) 6 1 ( 2 5 . 1 ) 5 . 8 3 ( 0 6 . 0 ) 8 0 . 5 1 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 5 3 8 / 3 / 1 8 4 1 0 0 1 1 E R K 1 ) 4 . 5 2 ( 0 8 . 0 ) 3 . 0 2 ( 3 8 . 1 ) 2 4 ( 1 9 . 0 ) 3 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 3

Microspeed Cylinder

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Horizontal Vertical (downward) Vertical (upward) 18 40 25 63 30 m s m s Type of impact Symbols : Speed of impacting object (m/s) m: Weight of impacting object (kg) F : Cylinder thrust (N) g : Gravitational acceleration (9.8 m/s2) s : Shock absorber stroke (m) Stroke Adjusting Unit/ Fine Stroke Adjustment Range s (mm) m Bore size (mm) Fine stroke adjusting range (mm) 16 0 to -10 25 0 to

Title not found

When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Piping port M5 x 0.8 GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

SYJA3000

SYJ3000-21-2A1 pc. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) 3.1-16 Series SYJA3000 Body Ported Base Mounted 2 position single: SYJA3120-M3(-F) 2 position single: SYJA3140-M5 10 10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 3.2 210 SlA 22 4 (Mounting hole) Manual override M3 X 0.5 (Pilot port) M3 X 0.5 (Pilot port) (Non-locking) A B 11 17.5 VlA 1 (Bleed port) 1.5 A B 1.5 1.5 5

VM

Mechanical Valve Series VM Model VM1000 VM100 VM200 Side piping Bottom piping Side piping Bottom piping Dimensions (mm) 11 X 36 X 16 11 X 28 X 25 17 X 44 X 25 17 X 44 X 30 25 X 40 X 52 Basic Roller Lever One Way Roller Lever Straight Plunger Roller Plunger Cross Roller Plunger Toggle Lever Push Button (Mushroom) Push Button (Extended) Push Button (Flush) Twist Selector (2 position) Key Selector

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

15

6, 10, 15, 20, 25, 32, 40 CY1S Series RoHS How to Order 25 300 M9BW Z CY1S Slide bearing Made to Order Refer to page 1501 for details.

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

VHK

C D E F G J K 15 2(A) 4 1(P) 4 VHK R-04F-04F 14.4 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHK R-06F-06F 16 6 6 16.8 VHK R-08F-08F 17 8 8 19.2 VHK R-10F-10F 29 10 10 23.3 VHK R-12F-12F 32 25.7 12 12 Flame Resistant Type: 1(P)/2(A): Male Thread Reference dimensions after

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

Compact Electric Actuator Series LG1

LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250 350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating