Low Differential Pressure Sensor

(12 VDC), 600 (24 VDC) Minimum load impedance: 50 PSE304 PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 4 to 20 mA Maximum load impedance: 300 (12 VDC), 600 (24 VDC) Minimum load impedance: 50 DC(+) DC(+) (Brown) (Brown) Analog output Load Analog output (Gray) (Gray) + + Load OUT1 OUT1 12 to 24 VDC 12 to 24 VDC Load (Black) (Black)

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Single rodl 0 lo 3o0 Dodde rcd 10 to 300 Long 3t|oke Doubb *ting SlrEi rodl 25 to 300 @Body options @Auto switcrr See catalog N320 for available auto swilches.

PF-OMN0009_C

U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/521() A AA PF3W504--

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

40 0.02 0.01 63 80 100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40

90

are used 200 200 When 20 units are used 77% reduction Current model IR3000 Series 91% reduction 38000 yen reduction 150 150 117000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1000-A Series IR2000-A Series IR3000-A Series 50 50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new

AS-FG/ASD-FG

, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03 AS431FG-N04 NPT1/2 63, 80, 100 AS421FG-N04 Note

1

G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 1/4 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 XSA1-2V 50 XSA2-2S 63 31.5 73.5 35 29.5 63 32.5 49.5 50 57 25.5 63 67 55 55 102 57 71 XSA2-2V 56 XSA2-43S 64.5 31 3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5

AMF

1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B 8B C 2B, 3B, 4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 x l400 Anchor bolt M20 x l500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 4B, 6B 870 M20 x l500 AMF1000 14-20-48

AMF

Maintenance Caution Model Connection (Flange) 2B 8B C 2B/3B/4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 X l 400 Anchor bolt M20 X l 500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 q It is not possible to indicate a definite replacement interval for the element because it varies with the odor concentration of the compressed air.

IDX-OM-U021

/60Hz) kW 8.0/9.0 10.0/11.5 12.0/15.0 () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.9/3.5 4.0/4.7 4.0/4.8 (50/60Hz) (50/60Hz) A 10.5/11.5 15.4/15.6 15.7/16.0 5 ) A 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K kg 245 270 350 1, 2 () kW 100 125 150 1(ANR)[2065%] 2[3275%] 3 4 5R 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4 ) R134a 1,430 1,430 R404A 3,922

Clean Regulator

100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

PSxx-OMU0005CN

24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-R () NPN 2 Max.28 V80 mA 1 V -21No.PS-OMU0005CN-C -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -Y () -V/-T () PNP 2 Max.28 V80 mA 1 V -22No.PS-OMU0005CN-C [] 3 0.2 [] / OUT2 OUT2 OUT1 OUT1 [F10]30 () 13 35 1 (62 ) () () (27 ) (29 ) (3 ) (25 ) 3 () 3 -23No.PS-OMU0005CN-C

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Connector Series VQ100 VQ110-M-M5 46.3 About 300 (In case of latching) 35.3 Manual override (Lead wire length) About 300 (Lead wire length) 4.9 4.9 12.4 15 E Lead wire color : Red 12 2.5 17 Lead wire color : Black 22.7(Mounting hole) In case of latching type In case of locking knob type SMC VQ110 -*M 34.8 30.7 JAPAN (5.9) 5 (5.9) 5 (4.1) 5 11 7 P A 4.9 8.5 4.9 3-M5 (M3) 30.2 36.6 ( ) :

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 75mm, First Stroke: 40mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 125mm, First Stroke: 60mm, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: Z (5m)

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 25mm, First Stroke: 5mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 150mm, First Stroke: 70mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: Z (5m)

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 150mm, First Stroke: 70mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.