Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Fluid Compatibility Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone Hydrogen peroxide Concentration 50% or less 50C or less Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Concentration 10% or less Deionized water Sodium hydroxide Ultra deionized water Toluene Hydrofluoric acid Concentration 50% or less Sulfuric acid

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

400 500 600 700 800 900 1000 1200 1400 1600 1800 2000 MY3A/3B 3000 16, 25, 40, 63 CAT.S20-153 English cat.no.ES20-153 Mechanical Joint Rodless Cylinder/Compact and Low Profile Series MY2H/HT Series MY2H/HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H 25 High

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

PSxx-OML0002CN

24 V 600 50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) -20No.PS-OML0002CN-G 1 1 1 1 ONOFF ON OFF ON P_1 H_1 [Pa] ON OFF [] -21No.PS-OML0002CN-G <> 1 [P_1][n_1] 1 1 -22No.PS-OML0002CN-G 2[P_2][n_2] (P1LP1H) P1L()P1H() (n1Ln1H) 1 -23No.PS-OML0002CN-G 2[

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Flow Speed 3/4B (21.6) 1B (27.6) 11/4B (35.7) 11/2B (41.6) 2B (52.9) 21/2B (67.9) 2 1.8 3B (80.7) 1.6 1.4 Flow speed (m/s) 1.2 1 4B (105.3) 0.8 5B (130.8) 0.6 6B (155.2) 0.4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.2 50 100 150 200 250 300 350 400 0 Flow

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Indicator light and surge voltage suppressor Coil voltage None With surge voltage suppressor With indicator light and surge voltage suppressor S Z 100V AC(50/60 Hz) 200V AC 110V AC 24V DC 12V DC Others voltages 1 2 3 5 6 Note) Coil voltage 100V AC: With surge voltage suppressor. Note) "YOZ" is not available. 9(1) Note 1) Contact SMC for other voltages.

08-cs1w-e

Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Kit no.

2/3 Port Valve

(Energized closed) Voltage 1 2 3 4 5 6 7 8 9 100V AC 50/60Hz 200V AC 50/60Hz 110V AC 50/60Hz 220V AC 50/60Hz 24V DC 12V DC 240V AC 50/60Hz 48V AC 50/60Hz Other (Contact SMC seprately) Options Standard F, G, L, T are available option. Refer to p.4.0-11 "Applicable Fluid Check List".

JIS Standard Hydraulic Cylinder

(n 2) (n = 2, 4, 6, 8) Note 3) 145 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 4) 115 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 4) 125 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 4) 135 + 50 (n 4) 2 110 + 50 (n = 4, 8, 12, 16) Note 4) Different surfaces (n = 4, 8, 12, 16) Note 4) n 75 + 50 (n 2) (n = 2, 3, 4) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 115 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 125 + 50 (n

Compact Guide Cylinder

The MGPKA (Plate material: Aluminum alloy) cannot be used as a stopper. 2 1 20 30 40 50 5 10 Transfer speed: [m/min] Bore Sizes 32 to 50 / MGPKFM32 to 50 (Slide bearing) m m MGPKFM32 to 50 (Slide bearing) L 50 mm L 50 mm 2000 1000 Mass of transferred object: m [kg] 500 400 50 300 When selecting a model with a longer L dimension, be sure to choose a bore size which is sufficiently large

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

bore size 20 5 5 4 (Steel pipe I.D.) 4 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 400 500 2.8 Flow velocity inside pipe (m/s) Piston speed (mm/s) Viewing the chart: Example) The flow rate necessary to operate a 50 cylinder at a speed of 100mm/s is 12l/min.

Tie-rod Type Hydraulic Cylinder

40 48.5 43 50 43 85 95 80 50 50 55.5 50 56 51 57 51 59 93.5 104 100 59 59 63 59 63.5 58.5 65 58.5 70 104 114 The auto switches listed below cannot be mounted on 63.

ISO Standard Hydraulic Cylinder

A6/A59W cannot be mounted to 40, 50.

XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

Modular F.R.L. Units

100 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)]

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350