Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(14 port) 12 VFS Y 5 3 37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B

ZQ-OM01401

) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 1 5 DI0 19 20 LZR LZ Encoder Z -phase pulse 23 DI1 Point table No.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Contact SMC when disassembly or maintenance is necessary . 169 Series 12-CY3R Magnetic rodless cylinder (Direct mount type) 15, 20, 25, 32, 40 How to Order Type Bore size Port thread type Clean series 12 Special treatment on sliding part Symbol M5 x 0.8 Rc NPT G 15 Nil Bore size (mm) 20, 25, 32, 40 TN TF 300 12 CY3R 25 N Standard stroke N Without switch rail Switch rail is not available

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

AZ1000

MPa (0.17MPa) Inlet pressure: 50 psig (0.34 MPa) AZ1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600

EXxx-OMN0037CN

) 0.05F.S. (25 ) 0.15F.S. (25 ) 0.5F.S. 0.6F.S. 70 mA IP67() 2 -1050 3 -2060 3585RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 290 g 1M12 (4 ) 2 3UL 0~50 -19No.EX-OMN0037CN-A (1)2 010 V05 V020 mA 15 V420 mA AD (ab) AD (0b) [V] [mA] 16 10 [V] [mA] 16 10 15 V 420 mA 010 V 05 V 020 mA 0FFF 4095 5.25 21 0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) Applicable Auto Switch Auto switch mounting Applicable air grippers Applicable rotary actuators Auto switch model Electrical entry Page Type CRB2 Size Size CRBU2 30 50-100 10/15 20-40 10-40 32/40 1/3 7/20 10-200 05/1 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB2 CDRBU2 CDRQ2MRQ

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

IDU/IDF

Dust proof filter set (A) (25) (25) (B) (10) Part No.

70pvpump

VDW Inlet air flow rate l/min (ANR) (2) 625 62 125 250 375 VQ Outlet air flow rate l/min (ANR) 50 100 200 300 500 VX2 Purge air flow rate l/min (ANR) (3) 12 25 50 75 125 VX Inlet air pressure (MPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.7 25 25 25 1 l/

VEX1

VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4 50 25 10 7 25 173 80 60 98 Center 2-M6 X 1 X depth 9 160 150 79 53 13 18 100 60 116.5 70 Rc(PT) 1, 1 Rc(PT) 1 25 VEX5710

MXU

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

MXU

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Model Selection 1

25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Transfer

-X 707 Stroke Reading Rodless Cylinder with Brake ML2B Series RoHS 25, 32, 40 CEP1 How to Order CE1 CE2 ML2B 25 500 L Y7BW ML2B ML2B Basic type Bore size Number of auto switch 25 32 40 25 mm 32 mm 40 mm Nil S n 2 pcs. 1 pc. n pcs.

Rotary Gripper Series MRHQ

Insert the switch into the switch case, and install switch holder B into the first groove (MRHQ 20, 25) or the second groove (MRHQ 10, 16) and secure the switch. Hole Switch holder B Switch holder A Switch guide Switch case Figure 2 Solid state switch First groove MRHQ 20, 25 D-F9 3.

LEF-OM002xx

Specification 2.1 Slider type LEF Series / Ball screw drive Specification (1) Step motor (servo 24VDC) Ball screw drive LEFS16 LEFS25 LEFS32 Model 50 to 500 50 to 800 50 to 1000 Stroke [mm] Note1) 14 15 12 25 30 20 45 50 LECP6/LECP1/LECPMJ/JXC91 Work load [kg] Note2) Horizontal 9 10 10 20 20 15 40 45 LECPA 2 4 0.5 7.5 15 4 10 20 Vertical 500 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400

Modular F.R.L. Unit

88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.