Slit Valve

CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 120 105 Air consumption 60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Large blow and

X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20

CRQ2

Weight JIS Symbol (g) Standard weight Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Values less the weight of auto switch. Precautions Be sure to read before handling. Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

switch: MDSUA3-S CRB2 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99/S99V/S9P/S9PV/T99/T99V CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 15.5 45

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 29 29 30 31 32 34 34 35 36 38 42 42 43 43 44 44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order . Specifications. Construction. Dimensions . Made to Order Specification . Related Products . About New air cushion mechanism.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

16 Stroke fine adjusting range (mm) Type MLU Side support A MY-S25A MY-S25B MY-S32A MY-S32B MY-S40A MY-S40B RB1412 RB2015 RB2015 Shock absorber model Side support B 58.8 58.8 19.6 Max. absorbing energy (J) ML1C For details about dimensions, etc., refer to page 9-14-9. 15 15 12 Stroke absorption (mm) D1000 1000 1000 Max. collision speed (mm/s) Auto Switch Mounting Bracket Part No. 25 25 45

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

2: White 1: Brown 30 White 15 Blue 4: Black 3: Blue Black M12 (Part no.: ZS-31-C) (31) 5000 Brown 45 23.5 When used as a switch output device 30 White No.

Soft Start-up Valve

tank New New 20 9.2 4 AV2000-A Current model 30 13.1 7.4 Up to 50% shorter 40 19.2 12.2 50 (Port size 3/4) 34.8 22.6 AV2000-A New New Fill time 50 (Port size 1") 41.3 24.4 Current model For 1(P) R 2(A) Improved adjustability at low speed air supply Needle Valve Flow Rate Characteristics Inlet pressure: 0.5 MPa 400 Air flow rate [L/min (ANR)] 350 Current model 300 250 200 New New AV2000-A 150

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

JXCx-OMT0005CN

. 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR . 23 5.2 MOTENC . 23 5.3 SII/O . 23 1 . 23 2 . 24 5.4 DeviceNet . 24 6CN1: . 25 6.1 . 25 6.2 . 25 6.3 . 26 1(C24V,M24V,0V) . 26 2(EMG) . 26 3LK RLS . 26 1 - 6.4 . 27 1 . 27 21 . 28 32 . 29 7DeviceNet 30 8LED . 31 8.1 LED . 31 8.2 LED . 31 9 . 32 9.1. . 32 9.2 No. . 32 9.3 / . 32 9.4 . 32 10 . 33 10.1 . 33 11 . 42 11.1 . 42 11.2 . 45

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Applicable bore (mm) A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 9-14-9 10 Series ML1C Construction Component Parts Material No. Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Note Hard anodized Hard anodized Material No.

CRQ2

kinetic energy (J) Cushion angle With air cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

ML1

C B A A B A B A B ML1C25 ML1C32 ML1C40 MY-S25 MY-S32 MY-S40 5.5 9.5 5 8 M6 X 1 50 35 117 103 6.6 11 6 11.7 M8 X 1.25 64 45 146 128 9 14 5 14.8 M10 X 1.5 80 55 170 148 4.7-9 Series ML1 Construction Component Parts Component Parts Description Note Material No Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Material No Aluminum alloy Aluminum alloy Aluminum

PA3145/3165/3185

(Value in the initial stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF. (Value in the initial stage) JIS Symbol Caution Precautions 1. Lubrication Since this valve needs lubrication, use turbine oil Class 1 (ISO VG32).

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

kinetic energy (J) Cushion angle With air cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150

Clean Rodless Cylinder Series CYP

Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.