Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K 8 6 6 5 N I ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 45 181 159 146 146 7

Vacuum System Peripherals:

Hysteresis 1 Output deviation (% F.S.) 0.5 Out Out How to Order 0 Return Return ITV 209 0 0 1 2 5 S 0.5 Pressure display unit Pressure range 5 kPa 9 1.3 to 80 kPa 1 0 25 50 75 100 Cable connector type Input signal (% F.S.)

VZ100/300/500

VZ 3 5 2R X20 ( ) VZ 3 5 X1 ( ) Entry is the same as standard products. Entry is the same as standard products.

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

OMR0032

Open collector input Turn ON No. 1 and No. 4, and (b) 5 VDC+/5% R1 = 220 turn OFF the others. Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

Modular Type Filter Regulator Series AW

2) Note 3) Pressure gauge Symbol 0.2MPa Note 3) Note 4) AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) Float type auto drain N.O.

IIIIIIIIII

F-4200-.5 F-4200-2 F-4200-5 F-4200-15 F-4200-30 F-4200-60 F-4200-100 .05 .2 .5 .5 .5 .5 1 .5 2 5 15 30 60 100 15 30 30 45 60 120 120 .05 .1 .4 1.0 1.8 3.5 3.5 .15 .3 .8 1.6 2.4 5.0 7.5 3A 10A 10A 10A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID

PFxx-OMS0001CN

4 mA [F98] -56No.PF-OMS0001CN-A [F99] <> [F99] [iNi] [ini] [] [oFF] [oN] 5 [F99] -57No.PF-OMS0001CN-A 1 // () 1 -58No.PF-OMS0001CN-A [LoC][][LoC] 1 [LoC]1 < -> 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] -59No.PF-OMS0001CN-A < -> [F81] 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] ( ) [000] 1 [UNLoC] [FAL] 3 [LoC] /30 -60No.PF-OMS0001CN-A [000] <> [UNLoC] 5 ( ) 1 1 -61No.PF-OMS0001CN-A

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4

CJP

10, 15, 20 5, 10, 15, 20, (25), 30 10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.

CJP

10, 15, 20 5, 10, 15, 20, (25), 30 10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.

JXCx-OMT0005CN

PWR) 5(P.23) 6CN1(P.25) 1 LED 5(P.23) 10.1 (P.33) MS ON DataRate OFF DateRate NS PLC PLC PLC PLC I/O PLC NS PLC PLC / 121 2 MSNS / NS PLC PLC / 121 NS Busoff 16. 3 ALM (P.64) 81 - USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM 4 LEC-W2 (LEC W2) (LEC)== =USB =PC (LEC) OFF PC (LEC) (PLC )(PC ) ONOFF PLC 5 10.1 (P.33) 3.(P.12) 82 - 5.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

6 11.6 21 13.4 34.7 AS221F-01-08ST AS221F-N01-05ST 16.5 NPT1/8 12.7 14.2 7 1.5 31.6 3/16" 13.2 24 31.1 18.5 25.3 32.4 8 15.2 23 23 AS221F-01-10ST AS221F-N01-07ST 15.3 17 1/4" 13.2 23.9 31 21 33.1 40.2 10 18.5 25 25 AS221F-02-04ST AS221F-N01-09ST 18.5 15.2 25.3 32.4 5/16" 16 4 10.4 25.2 34.4 40 AS221F-02-06ST AS221F-N02-03ST 17.7 16 5/32" 10.4 25.2 34.4 17 6 12.8 R1/4 17 18.5 7 1.5 34.7 40

3 Port Air Operated Valve Series SYJA300

of P port and R port. 1/8 4-4-12 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Type 20 Manifold: Top Ported/SS3YJ3-20Stations -00 (-F) [ ] for AC Grommet (G) 3.5 L2 (6) (2.5) (17.3) 10 (21.5) V100 M3 x 0.5 (Bracket mounting screw) 2-3.5 (For mounting) SY SYJ (Pitch) P=10.5 12.5 41.5 M3 x 0.5 (A port) 5 5 VK 2 (2.5) 1.9 10 5 10 5 VZ 12.7 R P P 26.4 21 25 48.6 [50.8] VT R

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

3

Please contact SMC to check if the valve can be used in the application by providing the relevant fluid circuit. 223 VXS Series For Steam Dimensions/Body Material: C37, Stainless Steel Grommet Conduit terminal 34 D Q2 S2 F F Q 300 D 40 (42) 32 25 a h e Built-in full-wave rectifier type T R E (With surge voltage suppressor) C R E d g J C G1/2 f j J 2 x M depth 5 H B1 B 2 x M depth 5 H B1