Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

PFxx-OMJ0005CN

(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01

Dedicated Controller

To minimize the voltage drop, use 100/200 V AC and 24 V DC wires with the largest sectional areas possible and keep the wiring length as short as possible. 5. The 100/200 V AC wire must not be bundled with or arranged in close proximity with the input/output lines of control terminals or encoder signal lines. If possible, keep a 100 mm or larger distance from such lines. 6.

IR1000/2000/3000

250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0

VXP21/22/23

VN Rated voltage 1 2 3 4 5 6 7 8 9 Solenoid valve option Nil Standard 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20 100 160 200 288 406 486 5620 7180 8255 30 40 20 Note) The width at closing/opening represent the valve when the exterior of the workpiece is being held. 927 Parallel Type Wide Opening Air

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

HEC_W-E

Table 3-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (S/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

3 Port Solenoid Valve Series VQ100 1

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.

Coolant Valve

rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual override 7 7 Non-locking push type Non-locking

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Max. operating frequency 10 Hz Lubrication Manual override Non-locking push type Mounting orientation Unrestricted 150/50 m/s2 Impact/Vibration resistance (2) Dustproof Enclosure Grommet, Conduit, Conduit terminal, DIN terminal 100, 200, 110 , 220 , 240 Electrical entry DC AC (50/60 Hz) Coil rated voltage (V) 24, 12 15 to +10% of rated voltage 19 VA (50 Hz), 16 VA (60 Hz) 11 VA (50 Hz),

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

Digital Gap Checker

The graphs below show the variation of the distance for the product to turn ON, for 3 types of gap, by changing the supply pressure (50 kPa) when the product is set to turn ON at 150 kPa supply pressure. Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube Test conditions G, H type: 6 x 4 tube Reference pressure: 150 kPa : Use within the rated pressure range (100 kPa to 200 kPa).

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

VCL

VC (1) Fluid temperature (C) 10 to 60 (No freezing) 10 to 100 Dusttight, Low jetproof (equivalent to IP65) Enclosure VDW Environment Location without corrosive or explosive gases VQ Valve leakage (cm3/min) 0 (with oil pressure) Mounting orientation Unrestricted VX2 (3) 30/150 or less Vibration/Impact resistance (m/s2) 24, 12 VDC, 100, 110, 200, 220, 230 VAC (50/60 Hz) 100, 200, 220, 230

VNC

105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80 140 150 204 235 175 185 305.5 341.5 210 240 17-4-26 7 Series VNC Coolant Valve: Air Operated/External

Smooth Cylinder Series CQSY

Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible even at a

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

High Power Cylinder:

[mm] 300 100 200 50 100 50mm/s 20 25 32 40 0 1.0 0 2.0 10 Time [s] Cylinder size [mm] 4.10-2 Series RHC low/medium speed opration with heavy loads 20 , 25 , 32 , 40 Cushion Ring MK/MK2 RSQ/RSG The long cushion ring can absorb larger energy (in terms of speed and weight).

RB/RBL/RBQ

Suitable 20 for m and 0.7 for . 1000 ML2B 6 10 15 20 25 30 40 50 63 80 100 125 140 160 180 200 250 300 0.057 0.099 0.113 0.120 0.184 200 300 400 500 E1 4.9 J In the case of cylinder stroke at load and free horizontal impact, 0.157 0.274 0.314 0.334 0.511 C J G5-S E1 or E substitute respective figures for Data A in order to calculate E1. 100 Impact object weight m or corresponding weight