Stations: 4 Stations, Port Size: LN7 (Top Ported Elbow w/1/4" NPT One-touch Fitting), Cable Length: 2 (3.0m Cable 27 Pin), Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Port Size: LN7 (Top Ported Elbow w/1/4" NPT One-touch Fitting), Cable Length: 3 (5.0m Cable 27 Pin), Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 8 Stations, Port Size: LN7 (Top Ported Elbow w/1/4" NPT One-touch Fitting), Cable Length: 1 (1.5m Cable 27 Pin), Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: LN7 (ø1/4" One-touch Fitting, Top Ported Elbow), S Kit: SEB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 5 Stations, Port Size: LN7 (Top Ported Elbow w/1/4" NPT One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 3 (5.0m Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 7 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: LN7 (ø1/4" One-touch Fitting), Upward Elbow

Speed Controller with Indicator

02-06 (S) 6 10.4 23.4 32.7 (32.8) AS221FS-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FS-02-06 (S) 6 1/4 17 (17.5) 13 13.3 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33) AS42l1FG-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7 42.3 40.7 37.1 35.5 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Brake mechanism added

ML2B Component parts Note Description Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Free-cutting steel Aluminum alloy Carbon steel Carbon steel Carbon steel Carbon steel Special friction material Material Carbon steel No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 No. 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51

Compact Hydraulic Cylinder

93 80 M16 x 2 132 6 22 11 100 20 25 98 28 57.5 89 26 17.5 depth 13.5 77 11 Rc3/8 112.5 100 M20 x 2.5 156 6.5 26 12 107 24 30 117 29 67.5 95 26 17.5 depth 13.5 94 11 Rc3/8 132.5 Rod end male threads (mm) H C D L K X Bore size (mm) 20 M8 x 1.25 15.5 10 23 8 18 32 M14 x 1.5 27 16 38.5 14 30 40 M14 x 1.5 27 16 38.5 14 30 M18 x 1.5 50 32 20 46 18 35 M18 x 1.5 63 32 20 46 18 35 M22 x 1.5 37 25 51

Cylinder

II NN I Rod end without '~uto switch illG i ;:xI I ~ 2.FC thread Bore size S z I With 'al:lw switch I wi (mm) 30 51 I 5st 2051 1551 I 20st ~ ~ H 5" 10" 10 st 1 15 51 i 30" P I 6 30.5 35.5 40.5 45.5 3 47.5 52.5 57.5 62.5 18.5 20 , 22. 10 30.5 35.5 40.5 1 45.5 65.5 55.5 1 3 i 50.5 55.5 1 60.5 ;:5:5 1 21 f 30.5 15 35.5 40.5 145.5 26.5 55.5 1 4 54.5 59.5 I 64.5 69.5 79.5 1 23 ~F .Ot ~ .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51

CL

CNA Head Side Flange Style CNS Without rod boot With rod boot Bore size (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 CLS 20 25 32 40 CLQ MLGP Rod Side Trunnion Style Rod side trunnion style: CLG1UN RLQ Without rod boot With rod boot Bore size (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z Z TT MLU 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 66 73 73 82 46 51 51 62 10 10 10 10 5.5

Rotary Actuator/Vane Type

Dimensions Page 73 V Free Mount Type Rotary Actuator with Angle Adjuster/Vane Type CRBU2WU Series How to Order Page 78 Construction Page 79 Dimensions Page 80 V Simple Specials Shaft Pattern Sequencing1 -XA1 to -XA24 Page 84 Shaft Pattern Sequencing2 -XA31 to -XA58 Page 90 DV Made to Order Page 96 V Component Unit Page 99 V Angle Adjustment Setting Page 100 V Auto Switch Mounting Page 102 51

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10 Symbol 2 Long Stroke -XB11 Available with long strokes exceeding the standard strokes. The stroke can be set in 1 mm increments.

VK300

VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal type Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram

Aluminum High Vacuum Angle Valve

type of heater.For further details, refer to mounting positions under Replacement Heaters on page 465. 423 B XLC/XLCV Series Dimensions XLCV/With solenoid valve R N P In case of double solenoid valve Port R (Exhaust port) Q K L M Port P (Pressure port) In case of single solenoid valve (mm) P K L M N Q R Model XLCV-16 XLCV-25 XLCV-40 36 14.3 9.2 6.4 3.5 2.7 17.3 41 15.8 9.2 6.4 3.5 2.7 15.8 51

High Vacuum Angle Valve

details, refer to mounting positions under Replacement Heaters on page 465. 439 B XLG/XLGV Series Dimensions XLGV/With solenoid valve R N P Port R In case of double solenoid valve (Exhaust port) Q K M L Port P (Pressure port) In case of single solenoid valve (mm) N K L M P Q R Model XLGV-16 XLGV-25 XLGV-40 6.4 14.3 9.2 3.5 2.7 17.3 36 6.4 15.8 9.2 3.5 2.7 15.8 41 6.4 29 9.2 3.5 2.7 2.6 51