SI Unit: DeviceNet, Input Block Stations: 1 Station/M8: 4 Inputs 3 Pins, Input Block COM: -COM, Stations: 3 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: QW (DeviceNet), Input Block Stations: 13 (1 Station/M8: 4 Inputs 3 Pins), Input Block COM: N (-COM), Stations: 3 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

Electric Actuator with Integrated Guide

-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100--X10 LTF6EPF200--X10 LTF6EPF300--X10 LTF6EPF400--X10 LTF6EPF500--X10 LTF6EPF600--X10 1.

Compact 5-Port Solenoid Valve

C10: 10 (SMC) C12: 12 (SMC) L1 = 16 x n1 + 147 + 47 x n2 L2 = 16 x n1 + 53.5 L4 = L3 10.5 L5 = (L3 L1) / 2 L6 = 47 x n2 + 81.5 * These figures show the JJ5SY5-10S6Q22-05D-C12. * Refer to page 99 for dimensions of external pilot (Made to Order) and silencer. n1: Valve stations n2: I/O unit stations L3: DIN Rail Overall Length Valve stations (n1) I/O unit stations (n2) 2 3 4 5 6 7 8 9 10

LEC-OM02704CN

)0 RX(n1)1 RY(n1)9 RX(n1)9 RY(n1)A RES RX(n1)A ALM 15 RX(n1)B Ready CRD RY(n1)B RX(n1)C RY(n1)F RX(n1)F (RWwn) (RWrn) RWwn 1 RWrn 1 RWwn1 2 RWrn1 2 RWwn2 RWrn2 RWwn3 RWrn3 . n 3 11 3CC-Link (2) 2 RXn/RYn64RWrn/RWwn8 (RYn) (RXn) () () CN6 () () CN6 RYn0 ON SON RXn0 RD 14 RYn1 ST1 RXn1 INP RYn2 ST2 RXn2 CPO RYn3 DOG 2 RXn3 ZP 16 RYn4 LSP 3 RXn4 TLC RYn5 LSN 4 RXn5 RYn6

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) (Station 1) (Station 1) (Station n2) Light/surge voltage suppressor Individual SUP spacer Individual EXH spacer 63.5 60 52.5 12 (For DIN rail mounting) (7.5) n1 = Valve stations n2 = Input block stations L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 L1: DIN rail overall length Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13

Series SV

) (Station 1) n1 = Valve stations n2 = Input block stations Light/Surge voltage suppressor L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 63.5 60 52.5 12 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block stations (n2) 0 1 2 3 4 5 6 7 8

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

High Vacuum Angle Valve

Example) In cases where the material of the valve seal is changed: XLA100-30-1-N1-X152 Exterior Seal/Valve Seal Model Description (Construction no.)

SV

) (Station 1) Individual SUP spacer Interface regulator SV2000-00SV2000-M1Interface regulator Light/Surge voltage suppressor Individual EXH spacer MAX.21 63.5 60 52.5 12 (For DIN rail mounting) n1 = Valve stations n2 = Input block stations (7.5) B B B B 145.6 127.6 L2 = L110.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A

Aluminum High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate w/Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: C3 (ø3.2 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 3 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings SS5Y3 3 STA MANIFOLD BASE. 4/5 PORT SOLENOID VALVE. 0.00000 lb. SY.

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 3 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting)