MLGC

86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 30 40 37 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 142 19 22 110 194 80 170 35 45 42 19 Data P GD GK GL GQ GR H I J K L M N O Q R S Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 M5 x 0.8 54 4 4 35 105 50 25 M6 x 1 14 26 M10 x 1.5 depth18 95 9 70 4 103 M5 x 0.8 62 7 7 40 125 60 32 M8 x 1.25 14 31 M10 x 1.5 depth18 95 9

Air Pilot Operated Series NVSA

NPTF 1 . 1 0 0.83 F | E ANStSymbol i (as a nolmalty closd }way) Cv Ratlng 16, NPTF 2.54 %, NPTF 2.58 4.17 7.'

PF2D

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-42 7 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Functions/PF2D Refer to the operation manual how to set and to operate. Output types Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected.

Auto Switch Guide

l) 20Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l Data 1.

LC6D/LC6C

Motor side 16 pulse End side 1 A Parameter no.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

196 20 21 62 89 153 46 149 42 50 50 144.5 156 199 25 29.5 41 84 131 152 172 199 20 16 37 57 84 63 63 Note) Intermediate strokes other than standard strokes are produced by installing spacers. 5

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Motor side 16 pulse End side 1 A Parameter no.

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

New

C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Rated voltage [V] 24 VDC 10% Power consumption [W]*4 38 50 100 Standby power consumption when operating [W]*5 16 44 43 Max. instantaneous power consumption [W]*6 57 123 141 Type*7 Non-magnetizing lock Lock unit specifications Holding force [N] 47 78 157 72 108 216 75 113 225 Power consumption [W]*8 5 5 5 Rated voltage [V] 24 VDC 10% *1 Speed changes according to the work load.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

Check Valve Series AK 1

6.5 11.11 13.6 1/4 14.29 17 H M 14.29 5/16 18.5 14 42 A 17.46 L 54.2 47.2 49.2 60.5 54.5 17.46 3/8 24 21 22.23 Connection thread 1/2 34 22.23 22 Reference dimensions of NPT thread after installation.

AKH/AKB Series

24 43 47 40 79 87 85 2.8 5/32 12.7 2.8 6.5 6.5 6.5 11.11 13.6 1/4 H 14.29 17 M 14.29 5/16 18.5 A 14 42 L 17.46 54.2 47.2 49.2 60.5 54.5 17.46 24 3/8 21 22.23 34 1/2 22.23 22 Connection thread Reference dimension after screwing into NPT threads.

KP/KPQ/KPG

1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination controlled stainless steel regulator Series Body Diaphragm Port size Rc Liquid-contact part materials 1/8 1/4 3/8 1/2 9/16-18UNF 7/8-14UNF Series SRH Liquid-contact surfaces PTFE + Fluoro rubber (grade A) Fluoro rubber (grade B) SUS316L (fluid-contact

AKH/AKB Series Check Valve with One-touch Fitting

24 43 47 40 79 87 85 2.8 5/32 12.7 2.8 6.5 6.5 6.5 11.11 13.6 1/4 H 14.29 17 M 14.29 5/16 18.5 A 14 42 L 17.46 54.2 47.2 49.2 60.5 54.5 17.46 24 3/8 21 22.23 34 1/2 22.23 22 Connection thread Reference dimension after screwing into NPT threads.

Vacuum Equipment

17 16 19 24 24 40 50 63 80 100 125 27 36 45 56 71 91 29 39 46 57 69 92 32 42 49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Description Material Note No. 1 2 3 4 5 6 7 8 9 Description Material Note 20, 25: Resin Body Aluminum alloy Hard anodized MHY 10 Cap 32 to 50: Aluminum alloy Piston Hard anodized Aluminum alloy Hard anodized 11 12 13 14 15 16 17 Piston bolt Stainless steel Pinion gear Carbon steel Heat treated MHW MHW Ball bearing Carbon steel Seal cover Schield type Brass Key Carbon steel Bumper Urethane