HRX-OM-I051

Check for fluid leak from circulating fluid piping in your system. 20 Internal Pump Time Out WRN Continued 21 Controller Error FLT Stop An error was detected in the control system. Contact the system supplier for request of inspection and repair.

FILTER REGULATOR

AW20-B 11 AW20-B 0.80.1Nm AW30-B 17 AW30-B 2.350.3Nm AW40-B 21 AW40-B 3.50.3Nm Disassembly Remove the bowl assembly, housing, and element. Hexagon Remove a housing from a body by turning 4 mounting screws to the left with a hexagon wrench key. wrench key Nominal5 Remove the valve guide.

FILTER REGULATOR

Hexagon wrench Tightening torque key Nominal5 4.51.0N 21 ) Bracket assembly, panel mount Applicable model Process Procedure Tools Check items Assembly Mount the parts to the bracket (panel) Mate the bracket(panel) concave and the bonnet convex to mount the bracket. Settle the bracket (panel) with set nut.

Lubricator

How to Replace the Components 21-30 10-1. Bowl Assembly Replacement 21-23 10-2. Bumper Retainer Assembly Replacement 24-27 10-3. Bumper and Sight Dome Assembly Replacement 28-30 11. Disassembly Drawing 31-32 12. Dimensions 33 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

AIR COMBINATION

AD38-A AD48-A Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Spacer with bracket AKM2000-01-A AKM3000-(01)-A AKM4000-(02)-A Check valve Note5) Note6) AKM2000-(02)-A AKM3000-02-A AKM4000-03-A IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A Pressure switch Note6) Y210-(02)-A Y310-02-A Y410-03-A Y510-03-A Y610-(04)-A Y610-04-A T-Spacer

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

dimensions Port size Rc VS A Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16

ASP

Model D3 T2 L5 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 14 15.8 18 19.7 20.3 23.1 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 32 35 65 68 107 110 212 215 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 34.6 33.9 11.8 39.6 38.9 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal dimensions Port size Rc VS A Model B C D E F G H J K L M N P R S T U VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19

20

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size Nil 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

20

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

PFxx-OMX0007

Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -48No.PF-OMX0007-A [Line name communication data] Value (16 hex 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) Display letter 7seg 11seg Value (16 hex 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) Display letter 7seg 11seg Value (16 hex 20 21 22

Digital Flow Switch (Integrated display type) ( compatible)

-LTQ-M-X445 0x0013 (19) 0 R Product ID Example: PF3W720-04-LTQ-M-X445 (20) 0 R Product text FloW sensor 0x0014 Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y: Small revision

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

Air Pilot Operated

3.78 3_78 3.7E Nt/sA 4t 04 spoor 5lrof6: In. (mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

Vacuum Gripper

When you remove the tube, push the release button and pull out the tube. * When supplying release pressure is necessary, remove plug (part No.: KQ2P-04) and connect 4 tube to release pressure supply port (PD). Tie and fix the 4 tube and switch cable by using in the accessory tie band after connecting 4 tube.

Activated Carbon Filter

P A B C D E G J M N Q R S T U V AMK20 1/81/4 40 133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30 1/43/8 53 167 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 AMK40 1/43/81/2 70 212.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 semi-standard bowl Semi-standard specifications Model Metal bowl No.

Plate Cylinder with Lock Series MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 8 10 10 14 NT-03 NT-MU03 NT-04 NT-05 One piece is included with the rod end male thread as standard. 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 Snap ring C8 type for pivot C10 type for pivot C10 type for pivot

Air Pilot Operated Series NVSA

3.78 3_78 3.7E Nt/sA 4t 04 spoor 5lrof6: In. (mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!