SMC Corporation of America
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Filtration 30 m ZQ107 0.7 ZQ110 1.0 1 Series ZQ How to Order ZQ1 07 5 D31 1U K1 L C Ejector unit Nozzle nominal size Check valve 05 07 10 Nil K None With check valve 0.5 0.7 1.0 Note) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used.

Nozzle Diameter: 07 (0.7mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07), Port Size: 01 (Rc1/8, Female Thread)

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead wire length 3m Without lead wires C CL CN Switch type Body type Without 1 point setting/analog output 3 rotations, NPN output T14 For single type Common SUP for manifold Individual SUP for manifold 1 3 5 Without 1 point setting

diameter C C CN Lead wire length 0.6 m Lead wire length 3 m No lead wire 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm ZL Refer to Table (2) for lead wire with 4-wire connecor.

Filtration 30 m ZQ107 0.7 ZQ110 1.0 13-9-1 2 Compact Vacuum Ejector Series ZQ How to Order ZQ1 07 5 D31 1U K1 L C Ejector unit Nozzle nominal size Check valve 05 07 10 Nil K None With check valve 0.5 0.7 1.0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) The

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

SI 1oo1Input N Input N+4 1 1 1oo2Input N Input N+4 11 1oo2 equivalent non-equivalent 1oo2-channel non-equivalentInput N Input N+4 1 39 No.EX##-OMY0006CN 1oo22 2 2 2 SI 40 No.EX##-OMY0006CN Start inhibit after discrepancy Input N Input N+4 Disable Enable 0 Safety Mode (Channel Passivation)Enable , Disable Safety Mode (Module Passivation/xxx)Enable 41 No.EX##-OMY0006CN 8.2.2.5.

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

(CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC/TB . 20 .CN4 . 21 6.1 . 21 1 - 6.2 . 21 6.3 . 22 . 23 7.CN3 . 24 8.CN1IF (CONT) . 25 8.1 . 25 8.2 . 27 9.CN2TB/PC . 28 9.1 . 28 10.LED . 29 10.1 LED . 29 10.2 IF LED . 29 11. . 30 11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

Changing PD06 from 002B to 0006 0 6 -41- (2) Symbol allocation using the setup software: Changing pins CN6-2 from Proximity dog (DOG) to Clear (CR). Change PD06 from 002B to 0006 in the I/O settings tab. Click on the "Single Axis Write" button. Cycle the power off, then on for the parametersto be enabled. 002B 0006 Please allocate pins CN6-2 separately.

Actuator operation from host . 40 8.1 CiA 402 drive profile . 40 8.1.1 FSA state . 40 8.1.2 Controlword / Statusword . 41 8.1.3 Control mode . 42 8.2 Parameter setting . 43 8.3 Servo-on and Homing . 44 8.4 Positioning operation (Profile position mode) . 45 9.

Acceleration/de celeration time 0 to 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min). -41- 5.5 Changing I/O Signal Allocation Input/output signal assignment can be changed as appropriate from initial settings. There may be cases when changes to the Input/output signal assignment are required for actuator operation.


Type 41, 42, and 43 base mounted manifold gasket part number.: SY□000-GS-2(-Q) (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3140, SY5140, SY7140, SY9140, etc.
Note) For type 41 and 42 SY5000/7000 series manifolds, when there is a “-Q” (CE-compliant product) suffixed to the part number, suffix a “-Q” to the gasket assembly part number as well .

ZS-27-01) M3 x 8L Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 16-3-44 13 Series PSE Specific Product Precautions 3 Be sure to read before handling. Set Differential Pressure Range & Rated Differential Pressure Range Caution Set the pressure within the rated differential pressure range.

Sockets Mounting bolts VQ7-6: M5 VQ7-8: M6 Proper tightening torque Nm 0.8 to 1.2 Receptacle housing Window Coil 41 Series VQ7-6/7-8 Specific Product Precautions 2 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.