VQ5000

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

MU

For details, refer to page 7-9-36. 7-8-21

MU

For details, refer to page 7-9-36. 7-8-21

Guide Cylinder Series MGG

25 M10 x 1.5 depth 21 12 11 160 140 182 For long strokes Bracket mounting strokes Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm

RHC

(mm/s) 2000 10 32 1/4 1/4 2500 3000 12.5 15 30 6 10 1/4, 3/8 = 0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1/4, 3/8 3/8 3/8 3/8 1500 2000 2500 3000 12 16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed

SMC

-10 13-/22-MXS16L-20 13-/22-MXS16L-30 13-/22-MXS16L-40 13-/22-MXS16L-50 13-/22-MXS16L-75 13-/22-MXS16L-100 13-/22-MXS16L-125 145 MXS Air slide table 1322Dimensions / MXS20 1322Basic style 2-M6 x 1 thread depth 6.5 Operating port 2-Rc, G, NPT1/8 13 3 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA-M6

Environment

8 o !0 @8 !9 @1 @2 !3 !7 q r e i u @0 !6 !5 !4 !1 !2 y w t In-line motor type: LEY63D @7 @8 @5 @6 When rod end male thread selected @9 @9 #0 @4 Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Modular F.R.L. Unit

10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge

44

H1 H2 12 8 12 32.6 29 5 11 16 KQB2 14 17 10 14 14 17 36.6 40.4 32.2 35.8 5.8 6.6 13 15 25 43 69 68 71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit for 2 to 24 stations/Single wiring L0 kit Stations (1 to 8) L1 kit Stations (1 to 8) L2 kit Stations (1 to 8) F1 F2 F3 P1 P2 P3 L0 L1 L2 Replacement Parts No.

HRX-OM-W038

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

HRX-OM-R016

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

CG1

8 !

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

100 100 125 125 Vacuum entry B01 N01 T01 Rc NPT NPTF 1 8 Pad type 1 8 HB Large bellows pad 1 8 Material N NBR S Silicon rubber U Urethane rubber F Fluororubber E EPR 1209 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 1/8 (Rc, NPT, NPTF) I I 1/8 (Rc, NPT, NPTF) Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 45 Width

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1/8 1/8 1/4 Up to 300 7.5 8 15.5 13 26 5 8 22.3 34 M8 X 1.25 M20 X 1.5 41 8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11