CEx-OMI0064 b. c. 1 - 1. 1. 1. (), 2. ,, 3. F.G.
(For mounting) 34 8.5 63.6 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) VGA B A 1 1 13 3 VPA B A 34 27 B A 1 1 1/8 (A, B port) 2 x 3.2 (For manifold mounting) 17 R1 R2 P VPA3 35 31.5 63.6 35 2 x 3.2 (For mounting) Manual override 74.6 Manual override 1/8,1/4 (P , A, B port) 28 25 21 14 74.6 54 1/8 (P , R1, R2 port) 40 2 x 1.8 (Bleed port) 25.5 20 12 1.6 P R2 R1 18 18 22 22 11.5 1/
With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.
Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.
IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)
0.5 0.5 1 0.4 0.5 1 0.5 0.5 1 0.4 0.4 0.8 0.5 0.4 0.8 0.5 __ 0.5 0.4 0.8 1 0.5 0.5 1 0.4 0.8 0.5 Note) Auto switches are not applicable to blank sections in the table.
2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.
ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.
Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High
AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.
wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22
84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4 RB0805X552 CY1F25 CY1F25 +0.012 0 -X Rc 1/8 1 5 7.5 5.5 140 NPT 1/8 G 1/8 5 9.5 depth 5.4 RB1006X552 Note 1) When adjusting
1 3.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 1 15.5 1 34 1 35.5 13 35 32 Additional Dimensions by Stroke Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 H I H I Stroke Stroke K P K P 5.1 K P K P 5.1 20 20 +10 5.6 +10 5.6 0 0 30 30 1 +1 +20 +4.9 +4.4 1 +1 +4.9 +4.4 +20 50 50 +25 +40 +49.9 +49.4 +25 +40 +49.9 +49.4 717 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer
10 P_2(n_2)1/10 P1HP1L(n1Hn1L)1/4 P2HP2L(n2Hn2L)1/4 -1/7 OFF -42No.PS-OMV0003CN-G OFF or or (3) QXZ((/)(*)) () () A~Z <3 > () OFF -43No.PS-OMV0003CN-G [F11] <> UPDOWN[F11] SET UP DOWN 1000 100 SET [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi] ([kgf/cm 2]/[bar]/[psi]) 27[F 0] -44No.PS-OMV0003CN-G [F14] Zero-cut 0 1.0F.S.0.010.0F.S. <> UP DOWN [F14] SET Zero-cut Zero-cut UP
When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
No.PS-OMV0008CN-E / / ISE70G--L2 ISE75G--L2 ISE76G--L2 ISE77G--L2 ISE78G--L2 2 9 10 12 15 15 17 19 21 22 3 23 25 27 27 28 F0 30 F1 OUT1 32 F2 OUT2 35 F3 37 F4 38 F6 40 F10 41 F11 47 F14 Zero-cut 48 F80 49 F81 50 F90 52 F96 54 F98 55 F99 57 58 IO-Link 63 IO-Link 63 63 64 IO-Link 67 76 76 77 86 88 -1No.PS-OMV0008CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO
AXT661-1 VG Cover Locking slotted style (Option) Hook Pin VP TURN PUSH TURN Lead wire: 0.2 to 0.33mm 2 (Max. covering O.D.: 1.7mm) Groove 1 0 0 1 0 1 Lever VQ Socket Part No. DXT170-71-1 OFF ON VQZ It can be locked in the ON state by turning the manual override to the right, setting the E mark to 1 and pushing it.
Remarks 1 * Tie-rod Stainless steel 4 2 * Tie-rod nut Stainless steel 4 3 Double clevis Cast iron 1 Metallic painting 4 Clevis pin Carbon steel 1 5 *Split pin Stainless steel 27 - Figure -7 Mounting bracket: Front flange (F) Table -16 Parts list (The item with * mark is different from the basic type 25A-C (D) S2.
A B C +0.030 4H9 0 depth 4 2 x 6.6 through (Body mounting hole) 2 4 3 52 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M6 x 1 thread depth 12 (Mounting thread) +0.052 27H9 0 depth 1.5 5 +0.030 4H9 0 depth 4 Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger opening port) 4 x M6 x 1 (Piston rod and rack screw) H 65 M5 x 0.8 (Finger closing port) 28.2 11 1 20 10 10