High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Ionizer Nozzle type IZN10 Series IZS

(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.

CEx-OMG0106

=F3x L3 M= WexL =5xVaxWxL 3 F3 L3 W4 an= F = M = E Fmax Mmax Emax W3 F / M / E : Calculate Load / Momentum / Kinetic Energy Fmax / Mmax / Emax: Max. loading / momentum / kinetic energy under the condition of allowable speed (valve obtained from graph) Ek= W V2 2g Allowable Momentum & Maximum Loading Model Allowable Momentum N.m Maximum Loading N M1 M2

ML1C

Moment (Nm) Moment (Nm) Moment (Nm) Load mass (kg) M1 = F1 x L1 Piston speed V (mm/s) ML1C/M2, M3 M2 = F2 x L2 M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A. Consider (1) max. load mass, (2) static moment, (3) dynamic moment (when stopper collides) when calculating the max. allowable moment and load mass.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc.

3

.S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

IDX-OM-W026

) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE: LN: LN PE: PE: PE: M3 6.5mm M3 2 1.25mm 6.5mm 2 1.25mm () () 13-5 3 5-2 IDF55E/75E

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Compact

Otherwise, the magnetic force within the actuator may be lost, resulting in malfunction of the auto switch. f. Crack on the back of the belt Workpiece Auto switch 5 mm or more 214

53

When this product is sold on the market in the EU after January 1, 2017, it needs to be compliant with the quota system of the F-Gas Regulation in the EU. Note 2) See specification table for refrigerant used in the product. 154-1 A

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking Retraction locking Variations Bore size (mm) Standard stroke (mm) Locking direction Mounting Series 20 25 30 40 50 75 100 LOCK 32 Extension lock Through hole LOCK 40 RLQ LOCK 50 Retraction lock Both ends tapped 63 Compact Cylinder with Air Cushion and Lock Series RLQ 32, 40, 50, 63 How to Order B 32 50 M F RLQ B 32 50 M F F9BW RDLQ With auto switch Number

IDX-OM-W023

IDU15E1 IDU Series 2 2 IDX-OM-W023 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDU8E-1015E1-10100V 100V 30mA 10A IDU8E-2015E1-20200V IDU8E-2315E1-23200V AC200V 30mA 5A IDU Series 2 3 IDX-OM-W023 2 216AWG 3 812 1.25 0.1m 30m M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () IDU Series 2 4 IDX-OM-W023 2 2 3 ()2 2 2-2-3 4 IDU Series

IDX-OM-W029

) (EVAPORATING TEMP) 5-2 5-2 (6 ) AC200V AC230V L1 L2 L3 PE L N PE M3 6.5mm 1.25mm M3 6.5mm 1.25mm 2 2 IDU Series 1-1 1 3 IDX-OM-W029 1 () IDU Series 1-1 1 4 IDX-OM-W029 2 2 2-1 IDU22E75E 90170kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14 1 IDU22E,IDU37E,IDU55E,IDU75E 2 2 3 80 80 OUT IN

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Calculate (1) (Wmax) from the graph of max. payload (W1, W2, W3) and calculate (2) and (3) (Mmax) from the maximum allowable moment graph (M1, M2, M3).

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Calculate (1) (Wmax) from the graph of max. payload (W1, W2, W3) and calculate (2) and (3) (Mmax) from the maximum allowable moment graph (M1, M2, M3).

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 5 3-M4 x 0.7 through Bottom hole dia. 3.3 6-6 counter bore depth 3.3 4-M3 x 0.5 Depth 5.5 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 17 38 39 15 19 10 18 19 18 5 5.5 10 5.5 5.5 NS 4 9 10.5 8.5 31 + Stroke 39.5 + Stroke 16 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 Stroke (mm) NS LT LB LA J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52

0.4

consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.