Manifold Regulator Modular Type ARM2500/3000 Series SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body ported De-energized Base mounted De-energized Component Parts q Description No.
Stations: 3 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)
(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.
: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 1 (100 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: Z [w/Light/Surge Voltage Suppressor (Type D Only)], Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: Z [w/Light/Surge Voltage Suppressor (Type D Only)], Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 6 (12 VDC), Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Move the piston to the stroke end of the side that will be filled with oil, and perform steps q through r in the same sequence as described above. MK/MK2 Environment UAvoid use near fire. UDon't use in the clean room. RSQ/RSG Mounting RSH UInstall the converter vertically. UInstall the converter at a position that is higher than the cylinder.
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Connecting Tube Diameter: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot