SMC Corporation of America
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Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

position is changed, go back to step q.

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Differential pressure indicator w O-ring order no. e O-ring order no. Port size q Seal order no. r Seal order no. t Seal order no.

This pushes the main valve up so that it creates a seal, and the inside of the bowl q is shut off from the outside air. If there is no accumulation of condensate in the bowl q at this time, the float w will be pulled down by its own weight, causing the valve r, which is connected to the lever e, to seal the valve seat t. !

End Plate Assembly > q U end plate assembly no.

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

A: Orange B: Green 17.5 16 14 12.5 17 15 (Rail mounting hole pitch 12.5) Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR32l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR32l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 782 Regulator IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR12l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon panel

w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

Thrust energy E Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Weight of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) Although the lock plate may slightly bend due to tightening of the lock plate holding bolt, this does not a affect the shock absorber and locking function.

U Q F I 22 M E Z D 11 Minimum bending radius for lead wire 10 Auto switch D-A7, A8 K L B + Stroke M E S A + Stroke J 2-cushion needle Rod end male threads H1 C1 L1 X Rod end nut Auto switch D-A9, F9 Rod end male threads mm Bore size (mm) X C1 H1 L1 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Standard type mm A B C D E F H I J K L M N Bore size (mm) 32

P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..

P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..

A B Weight [g] ZP3P-T50PTSFK10-B01 40.5 107 100.7 ZP3P-T50PTSFK20-B01 50.5 112.5 101.8 8 ZP3P Series Construction Pad with Adapter Male thread Female thread e w w q q Component Parts No.

E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.

8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !

8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No.

5For PROFIBUS DP K w For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK K w and K e are used in combination with each other. K !7For PROFIBUS DP For DeviceNetTM (Plug) For PROFIBUS DP (Plug/B-coded) Plug (Male) K q For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK RJ45 VProduct Table Description Application No. SMC part no.

Symbol Type Material D High speed de-ionizing cartridge Tungsten E Silicon L Energy saving type de-ionizing cartridge Tungsten M Silicon 2 u Plug position Symbol Position Nil Without plug Q High-voltage cable side R Opposite side of the high-voltage cable !