Environment

, 50, 100, 150, 200 250, 300, 350, 400 30, 50, 100, 150, 200 250, 300, 350, 400, 450, 500 For LECP6 LECP1 LECPMJ (3000 [mm/s2]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note

MNB

(Assuming approximately 30% dispersion.)

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

CY1

Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

MHZ

Required gripping force = 0.1 kg x 20 x 9.8 m/s2 () 19.6 N or more 0 10 20 30 40 50 60 Gripping point L (mm) Selecting MHZ2-16D. A gripping force of 24 N is obtained from the intersection point of gripping point distance L = 30 mm and pressure of 0.4 MPa.

MHZ

Gripping point L (mm) DMHZJ2-16D/11-MHZ2-16D 2050 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 40 0.6 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.4 MPa 30 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

VDC + + Load Load 18 to 30 VDC U White N.C.

IDG

Construction Refer to pages 14-19-30 to 31.

REA/REB

Cushion Stroke Allowable load weight Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model 2.7 7.0 11.0 18.5 18.5 30.0 0.55 0.65 0.65 0.65 0.65 0.65 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 20 25 30 30 30 30 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 10-2-54 54 Sine Rodless Cylinder High Precision Guide Type Series REAH Stroke Adjustment The adjusting bolt is adjusted to

HRX-OM-Q026

the circulating fluid temperature that enters the user's equipment is 29 oC due to temperature drop while it is transferred to the user's equipment in the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When

REA/REB

Cushion Stroke Allowable load weight Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model 2.7 7.0 11.0 18.5 18.5 30.0 0.55 0.65 0.65 0.65 0.65 0.65 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 20 25 30 30 30 30 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 10-2-54 54 Sine Rodless Cylinder High Precision Guide Type Series REAH Stroke Adjustment The adjusting bolt is adjusted to

MGG

(mm) Bore size (mm) Stroke range (mm) AC AF AB AE AA AD AP N M L F K C E J A B D G H I 20 25 32 40 50 75, 100, 125, 150, 200 11 30 16.5 M5 x 0.8 depth 10 12 75 25 45 25 80 60 92 55 99 24 5.5 M8 x 1.25 depth 14 108 60 30 9.5 depth 6 13 16.5 30 M6 x 1 depth 12 16 85 30 54 35 100 70 113 65 109 26.5 6.6 M10 x 1.5 depth 18 130 65 35 11 depth 8 75, 100 125, 150 200, 250 300 16 35 19 M6 x 1 depth

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

HRX-OM-X037

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 HRL Series 5.4 Description of the Screen 5-31 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions Pump operation mode 4.

HRX-OM-W002

40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz 60Hz

Series IDG

= 0.7MPa 30 30 40 50 0 40 100 200 300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/

MB1

C0.5 file chamfer R sphere 30 30 30 Symbol: A12 Symbol: A13 Symbol: A11 Symbol: A14 Symbol: A15 30 30 30 C0.5 R sphere R sphere Symbol: A19 Symbol: A16 Symbol: A18 Symbol: A17 Symbol: A20 30 30 30 30 30 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 Symbol: A25 30 30 30 Symbol: A29 Symbol: A28 Symbol: A26 Symbol: A30 Symbol: A27 30 30 30 30 30 20 Series MB1 Special port locations XC3