Base Size: 6 (1), Piping: 0 (P Side) (A, B Side) (E Side), Stations: 7 Stations, Base Specifications: 1 (Common Exhaust), A, B Port Size: 10 (1)

Manifold Type: 30 (Top Ported Common EXH), Stations: 7 Stations, Passage: 1 (Type 30)

Piping: Body Ported, Stations & Port Location: 7 Stations (Type 20, 41, 42, 43), Port Size: -, Thread: -

Piping: Body Ported, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: -, Thread: -

Stations: 7 Stations, Thread: -, Option: -

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 07, Type: Common Exhaust, Thread: -

Base Size: 1, Piping: P Side) (A, B Side) (E Side, Stations: 7 Stations, Base Specifications: Common Exhaust, A, B Port Size: 1, Thread Type: -

Manifold Type: Top Ported Common EXH, Stations: 7 Stations, Passage: Type 30, Port Size: -, Thread Type: -

EXxx-OMY0006CN

-2 iAddValue (hex) 03F2 iPar_CRC i03FD PST_Device_ID 104 No.EX##-OMY0006CN 21.E SI / Checklist / EX245-FPS1 HW/SW 01/1.1.1 2021 1 29 No.

4-channel Flow Monitor ( compatible)

No.PF-OMA1011-A PRODUCT NAME 4-channel Flow Monitor ( compatible) MODEL / Series / Product Number PFG20# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 16 Internal circuit and wiring example 18 Outline of Settings 21 Initial Setting 22 F 0 Connection product

PF-OMN0009_C

-11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A 30 30A 250L/min G : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] L/min L/min(gal/min) JIS K6742 1 2 1~5 V 4~20 mA (PF3W3) 1~5(1) 1 N M8(3m) -12No.PF-OMN0009CN-F N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511

DOC1001322

Refer to the Communication Function of Operation Manual for details. (1) (2) (3) Setting of contact input signal form Table 5.4-21 Setting of contact input signal form No.

HRX-OM-W060

Date and time, Operation time and Alarm history are not reset. (1) Data reset setting screen Table 5.4-21 Data reset setting No.

7ND9071en

19 70mm 6 7.5 70mm 12 14 180mm 25 21 20mm 3 4 20mm ND9203 ND9206 VD_48 NDX VD_48 20mm 9 11 VC_70 140mm ND9206 20 19 40mm 4 7 40mm 12 15 180mm 24 22 50mm 5 8 50mm 14 17 240mm 28 27 60mm 6 9 60mm 16 19 VC_80 180mm ND9206 31 30 70mm 7 10 70mm 18 21 240mm 35 31 80mm 8 11 80mm 20 23 280mm 39 34 3 6 20mm VD_55 NDX VD_55 ND9206 Note: Mounted with ND9 / NDX smart positioners and B72G-2AS-980 AFR

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (16) Basic style replacement parts For with Air cushion refer to page 21 for detailed Product structure. Product no.

JXCx-OMT0062

Product Specifications . 17 3.1 Specifications . 17 (1) Basic specifications . 17 (2)CC-Link type . 18 3.2 Parts description . 19 3.3 Outside dimension diagram . 20 (1) Screw mount type LECPMJ-. 20 (2) DIN rail mount type (LECPMJD. 20 3.4 How to install . 21 (1) How to install . 21 (2) Ground wire connection . 21 (3) Installation location . 22 4.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

10

6 47 33.5 45 M6 x 1 6 15 16 4 40 27 14 30 52 38 16 12 35 13 14 27 8 51 38.5 52.5 M6 x 1 6 21 16 4 50 32 18 35 65 46.5 20 13 40 14 15.5 27.5 11 58 45 59 M8 x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5

Electric Actuator with Integrated Guide

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35V DC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) ALARM STOP 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being generated