AR425 to 935

VY1 How to Order G PPA Internal pilot operated relieving type regulator AR 25 4 BG R 02 Option Nil Flow direction: Right Left AL None Regulator R Body size Accessory 4 6 8 9 1 2 1 Symbol Description Applicable model Port size 1 Nil 1 4 02 03 04 06 10 12 14 20 2 1 With bracket AR45 to 65 AR25 AR35 B 8 3 2 G46-10-02 G46-2-02 Gauge 1 2 3 4 G Regulating pressure range Pressure gauges are shipped

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Universal type Port size in the cylinder side 6 8 12 10 4 (1) AS22 1FE-01 AS23 1FE-01 R 1/8 AS22 1FE-02 AS23 1FE-02 R 1/4 AS32 1FE-03 AS33 1FE-03 R 3/8 AS42 1FE-04 AS43 1FE-04 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 6 8 10 12 4 (1) AS221FE-01 AS231FE-01 R 1/8 20, 25, 32 AS221FE-02 AS231FE-02 R 1/4 20, 25, 32, 40 AS321FE-03 AS331FE-03 R 3/8 40, 50, 63 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

A-HEC-OM-J004

1-2 1.1.3 Symbols. 1-2 1.2 Hazard Warning Labels . 1-4 1.2.1 Location of hazard warning labels . 1-5 1.3 Location of Model Label. 1-7 1.4 Safety Measures . 1-8 1.4.1 Precautions. 1-8 1.4.2 Protective Equipment . 1-9 1.4.3 Long-term Storage . 1-10 1.4.4 Disposing of Product . 1-10 1.5 Interlock List . 1-10 Chapter 2 Description and Function of Each Part . 2-1 2.1 Liquid Tank/Controller. 2

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Bracket Stainless steel 304 -8- 2-3 Dimensions 1) SFB300-02: Rc1/4 2) SFB302-02: TSJ1/4 (Tube Swage Joint) 3) SFB305-02, SFB315-02: URJ (Union Ring Joint) Model A SFB305-02 79 SFB315-02 84 -9- 3.

CJ2X/CUX/CQSX/CQ2X/CM2X

to 200 mm/s 0.5 to 200 mm/s C J G5-S 8 M8 x 1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 M10 x 1.25 M10 x 1.25 JIS Class 2 CV +1.4 0 mm Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

to 200 mm/s 0.5 to 200 mm/s C J G5-S 8 M8 x 1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 M10 x 1.25 M10 x 1.25 JIS Class 2 CV +1.4 0 mm Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

VXP21/22/23

LVH Connection LVD 02 03 04 06 10 12 14 20 1 4 Thread type Nil T F N Refer to the table (2) given below for availability. 3 8 1 2 3 4 Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LQ 1 4 1 2 LVN 32 40 50 For 32A For 40A For 50A Flange TI/ TIL PA Refer to the table (1) given below for availability.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

155

1/2 3/4 1 3/8 1/2 3/4 1 3/8 1/2 3/4 1 4.6 6.5 11.8 18.3 3.5 4.8 7.1 11.0 1.25 2.7 4.5 7.3 0.5 MPa 1.0 MPa 1.6 MPa ( ): Mass including the bracket Add the mass of an auto switch additionally.

CEx-OMQ0013

" " UP 3 3 ) 41 PRG 1 STEP 2 " " " " 1 WRITE 3 PRG 1 STEP 3 " " 2 LEFT " " UP 3 PRG 1 STEP 3 " " " " 1 WRITE PRG 1 STEP 4 1 1 End " " " " " " 1 PRG 1 STEP 1 " " " PRG 1 STEP 1 UP No.8 " PRG "8" " " PRG 8 STEP 0 2 WRITE " End 42 End0.0 PRG 8 STEP 1 " " " " 1 LEFT PRG 8 STEP 1 " DOWN 8 " " " 1 LEFT DOWN 6 1 WRITE 2 PRG 8 STEP 2 " 5 UP 5 " " " PRG 8 STEP 2 2 LEFT

LUBRICATOR

HOW TO ORDER AL 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket 4 Option(Mounting) Nil Polycarbonate bowl 2 Metal bowl 6 Nyron bowl 8 Metal bowl with sight glass C With bowl guard (steel plate) 6C With bowl guard

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Description Applicable model Symbol 1 1 4 02 03 04 06 10 12 14 20 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 AR 25 AR 35

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

C D F J K ARP20(K) ARP30(K) ARP40(K) 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W

VXD21/22/23

LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8 40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.