C95

4 @3 #5 t @7 $5 !5 @4!8@0!7!9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

HRX-OM-M005

fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check of emergency off [EMO] switch . 4-1 4.2 Opening of Facility Water Valve . 4-1 4.3 Filling of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2 4.3.2 Supply of circulating fluid . 4-3 4.4 Requirement for Product Startup . 4-4 4.4.1 Turning ON power. 4-4 4.4.2 Circulating fluid

Step Motor Controller (Servo / 24 VDC)

Safety Instructions . 4 2.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Rotary Actuator/Vane Style Series CRB1

12.5 1 to 12.5 Y-4 L2-2 18.5 to 65 W2 L1-2 X-4 CRJ Symbol: A48 Symbol: A49 Shorten the short shaft.

Rotary Actuator/Vane Style Series CRB2

(mm) Q1=M Q2 Y L2 max Size (mm) L2-(3 x P) C1=C 10 Q1 X L1 max Size 3 5.5 to 8 Y-1 DY= 10 15 7.5 to 14 X-3 3 3, 4 7.5 to 9 Y-1.5 L2= C2=C 15 20 10 to 18 X-4 3, 4 3, 4, 5 9 to 10 Y-1.5 L1-(3 x P) X= 20 30 12 to 20 X-4.5 3, 4, 5 3, 4, 5, 6 11 to 13 Y-2 L1= Q2=M 30 40 14 to 22 X-5 3, 4, 5, 6 3, 4, 5, 6, 8 14 to 15 Y-4.5 71 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short shaft side

Serial Transmission System Series EX250 Series EX500

N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) 24 VDC 5 4 2 A B Note) B 1 5 3 P EA EB N.O N.O C: Locking type (Manual) Note 1) Function 2 2 position double (rubber) 4 position dual 3 port valve (C) Standard type (1 W) High voltage type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y D: Slide locking type (Manual) Note) A B 4 2 C Seal Note 2)

Step Motor Driver （ Pulse input type ）

Brown 2 A B-1 Cable length (L) Red 1 A A-1 Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A/COM B-3 A 10m *1) Blue 4 COM-B/ A-3 B 15m *1) Shield Cable color Terminal no. C 20m *1) Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 *1) Produced upon receipt of order. A A-5 Black 6 Only Robotic type cable can be selected.

33

1) C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2

MLGP

2 !3 !4 !5 !6 !7 !8 !

MLGP

2 !3 !4 !5 !6 !7 !8 !

Compact Cylinder

IY-G02 CD-MU02 CD-MU03 CD-MU04 Applicable retaining ring C-type 8 for shaft C-type 8 for shaft C-type 10 for shaft C-type 10 for shaft CDH10 (mm) CJ 7 10 10 CI 17 22 27 CH 11 13 13 CF 4 7 10 CE 3.5 3.5 3.5 CB 23 27 31 CA 53 67 85 Size 25 32 40 Part no.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n i ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D 1 D 2 L 1 L 2 A * M . t W ) f g ( 8 / 1 S 4 3 7 0 Y R K 7/ 6 1 ) 1 1 . 1 1 ( 8 6 . 0 ) 2 . 7 1 ( 9 3 . 0 ) 0 1 ( 9 8 . 0 ) 5 . 2 2 ( 3 9 . 0 ) 5 . 3 2 ( 5 6 . 1 ) 2 4 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 4 1 4 / 1 S 5 3 7 0 Y R K 9/ 6 1 ) 9 2 . 4 1 ( 8 0 . 1 ) 5 . 7 2 ( 3 7 . 1 ) 4 4 ( 4 2 4 / 1

LG1H

2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

Fieldbus system (DeviceNet compliant)

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

Floating Joint

C D E F K L T N J G H JAHL40-16-150 JAHL50-20-150 JAHL63-24-150 JAHL80-30-150 JAHL100-39-150 JAHL100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 70 80 88 96 116 116 28 35 38 45 55 55 50 59.5 66 79 96 96 42 48 54 60 74 74 36 44 48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 53 65 56 67.5 78 78 1.09 2.03

Mechanically Jointed Rodless Cylinder Series MY2

3 r$7#9 %2 !1 #6 !0 yoiu@2%0%1q%3e MY2C16 %7 @9 MY1W !6!7!8#8!9@0 MY2C %6 MY2H !5@8 @7 %5!2%4$2$4$5 @4 #0 !

MHZ2/MHZJ2

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1