30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Series IRV10/20 Vacuum Regulator

With ZSE30A-01-B-ML NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs With digital pressure switch Fittings Nil L Straight Elbow Note 1) Two plug nuts are mounted on the gauge port.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 Inch size Note) Polyurethane only.

IZx-OMV0005

Doc. no.IZ-OMV0005 PRODUCT NAME Ionizer Nozzle type MODEL / Series IZN10E Series 1 Doc. no.IZ-OMV0005 Contents Safety Instructions . 3 1. How to Order . 9 1-1.Ionizer body . 9 1-2.Accessories . 10 1-3.Repair parts . 11 1-4. Options . 12 2. Procedures to Operation . 12 3. Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

C95Series

te.IDI1ubIe de>~) MB-803 J MB805 1 MBEms Note 1) When ordenng trunnIon mounting braCket, order 2 pes. for 1 cylinder. Trunnion mounting bracket (mm) .

2/3 Port Valve for Various

7.5 12 22 30 48 1250 1730 2900 3700 4600 1 1 1 2 0.04 1.0 0.7 1.5 1 4 1 2 Note) Weight of grommet type.

90

BLEED 2 x 1/8 Pressure gauge port 141 43 91.7 76.1 65.3 22 48.1 EXH OUT IN 2 x 1/4 to 1/2 Port size 2 x 1/2 Port size 66 With digital pressure switch: IR30l1 2-0llEl-A 76 48 72.5 53 16 M12 x 1 Mounting hole 2.3 M28 x 1.5 BLEED 30 141 91.7 76.1 65.3 22 48.1 2 x 1/8 Pressure gauge port EXH OUT IN 66 2 x 1/2 Port size 2 x 1/4 to 1/2 Port size 804 IR1000-A/2000-A/3000-A Series Specific Product

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Max. 1 2 Min.

VFA3000

VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

IZN10_C

7 7 7-2. 2. 2. 2. 22 22 22 22 -2- 1. 1. 1. 1.

PSE540/560

Note 2) The connector is not connected to the cable and is supplied loose at the time of shipment. Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no.

S Couplers Series KKA

Body size Port size KKA3 S-01 M-1 R1 / 8 KKA3 P-01 M-1 R1 / 8 1 / 8 1 / 8 KKA3 S-02M-1 R1 / 4 KKA3 P-02M-1 R1 / 4 KKA3 S-03 M-1 R3 / 8 KKA3 P-03 M-1 R3 / 8 KKA4 S-02M-1 R1 / 4 KKA4 P-02M-1 R1 / 4 1 / 4 1 / 4 KKA4 S-03 M-1 R3 / 8 KKA4 P-03 M-1 R3 / 8 KKA4 S-04 M-1 R1 / 2 KKA4 P-04 M-1 R1 / 2 KKA6S-03 M-1 KKA6P-03 M-1 R3 / 8 R3 / 8 1 / 2 1 / 2 KKA6S-04 M-1 KKA6P-04 M-1 R1 / 2 R1 / 2 KKA6S-06M

Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

1 !2 !

Ozone Resistant

List of Ozone Resistant Products 1: Standard (HNBR) . 9 7. List of Ozone Resistant Non-HNBR Type Products 2: Series 80. 10 Reference Data: Photochemical Oxidants . 11 1.