MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

Series CQ2

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

LJ1H

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Pitching m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 14

VXP21/22/23

14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

Vacuum Equipment

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(L3) L2 3 L1 2 1 A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZF 15.5 12.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT25F-B8 25 28 M8 x 1.25 8 12 ZP 36 ZPT25F-B01 40 50 8 01 Rc 1/8 6.2 14 ZPT F-B (Without buffer/Female thread) ZPT32F-B5 32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

PC Wiring System

Dimensions 2 x 5 machined for bar ring Mounting hole 4 x M3 x 0.5 5 1010 55 55 1.2 Alphabetical Index Length Measuring/ Counter 6 (3.7) 67.4 59 55 65 CH IN OUT (3) 33.5 139 8 40 158 41.2 (2) 55 55 2 x 8 6 x 4 16 14 16 16 14 16 14 10 25 25 597 Series PCW 16 Point Output Reduced Common Unit Specifications Model Output PCW-993195 Weight 80 g Refer to page 43 in CAT.E02-20 about the circuit

AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

IDX-OM-O004C

T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !

Digital Gap Checker ( compatible)

Zero clear was performed in non-atmospheric pressure (Pressure outside of 14 kPa was supplied present.) Perform zero clear at atmospheric pressure. Zero clear error Fine adjustment of the pressure display at the OUT port was not performed correctly during calibration.

Large Bore Compact Cylinder Series CQ2

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

Precision Cylinder Series MTS

With end lock 3 124.5 + Stroke 145.5 + Stroke Basic type With end lock Accessories SMTS25, #1 (#1 + #2) SMTS25, #2 (#2 + #4) SMTS25, #3 8 Series MTS Dimensions/32 MTS32 73.5 18 14 69.5 2-cushion needle Basic type Width across flats 14 8 6 Rod cross section 2-Rc 1/8 (port size) 7 7.5 M8 x 1.25 38 0.2 17 20 +0.015 0 26 0.2 5 0 0.018 4-5.5 through 2 x 4-9, counter bore depth 5.5 (opposite

Environment

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

Series AP500

Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat. 4) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). 5) Tested with Helium gas inlet pressure 1000 psig (7 MPa). 6) On panel mount option, bonnet port is not threaded. 7) Mass, including individual boxed weight, may vary depending on connections or options.

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.