Guide Cylinder Series MGG 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 3 (Slide bearing type) 2.5 Deflection Y (mm) 800st 2 700st 600st 1.5 500st 1 300st 400st st: Stroke (mm) 0.5 100st 200st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM 50Stroke 4 (Slide bearing type)
Checker ISA3 Series Dimensions ISA3-mmm-mmmB-L1 (With control unit) L1 (23) 57 30 58.5 41.6 46.2 1.6 3.5 12 11 66 H 5.5 40.4 29 24 16 64.4 (Max. 67.4) 24 3.1 33 52.5 30 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 2 38 13 L2 (49) ISA3-mmm-mmmB-R1m ISA3-mmm-mmmB-R2m 29.3 L1 46.2 41.6 58.5 30 30 52.5 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1
G R 1.5" 2" 2.5" 3.25" 4" 150 200 250 325 400 For special rod end modifications, please see page 6-15-33.
G R 1.5" 2" 2.5" 3.25" 4" 150 200 250 325 400 For special rod end modifications, please see page 6-15-33.
3] Response time See page 28 2.5 ms [F 4] Auto-preset See page 29 Manual [F 6] Fine adjustment of display value See page 31 0 [F11] Display resolution See page 32 1000-split [F80] Power saving mode See page 33 OFF [F81] Security code See page 34 OFF [F90] Setting of all functions See page 35 OFF [F96] Check of suction command condition See page 37 OFF [F98] Check of output See page 38 Normal
3] Response time See Page 27 2.5 ms [F 4] Auto-preset See Page 28 Manual [F 6] Fine adjustment of display value See Page 30 0 [F11] Display resolution See Page 31 1000-split [F80] Power saving mode See Page 32 OFF [F81] Security code See Page 33 OFF [F90] Setting of all functions See Page 34 OFF [F96] Check of suction command condition See Page 36 OFF [F98] Check of output See Page 37 Normal
Setting of [F 4] Auto-preset completed. Press button in measurement mode to set pressure.
0] [F] 2 2 [F 0] 22 SI kPa [F 1] OUT1 23 HYS ONOFF -70 kPa(P_1) 10 kPa(H_1) [F 2] OUT2 25 A ON ON 5 kPa(H_2) OFF OFF 0 kPa(H_3) ON 1 kPa(H_4) -20NO.ZK2-OM00801-B A [F 3] 27 2.5 ms [F 4] 28 [F 6] 30 0% [F11] 31 1000 [F80] 32 OFF [F81] 33 OFF [F90] 34 OFF [F96] 36 OFF [F98] 37 [F99] 39 OFF -21NO.ZK2-OM00801-B [F 0] (kPa/MPa) <> [F 0] [F 0] 2 bar psi InHg mmHg MPa
E E F G H G H I I J K L M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F
Electric actuators / Common precautions . 33 6.1 Design and selection . 33 6.2 Mounting . 34 6.3 Handling . 35 6.4 Operating environment . 36 6.5 Maintenance . 37 6.6 Precautions for actuator with lock . 37 7.
339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350
Bellows seal C Double acting Bellows seal F Single acting (N.C.)
Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Push Button, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 9.05, Body
Body Option: 0 (Standard), Thread: Rc(PT), Style: 33 [Push Button (Flat Head)], Suffix: None, Accessory: F [Foot Bracket (Internal Pilot Only)]
A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.
Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1
Press this button to change to the peak display mode. button (UP) [F 4] [F 5] [F 6] [F 7] [F 8] [F 9] [Anr.] Standard condition [1.00] 1 second Selects the mode or decreases the ON/OFF set value. Press this button to change to the bottom display mode. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.