Nozzle Diameter: ø1.3, Body Style: Manifold w/Common SUP Valve, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: NPTF, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch

Nozzle Diameter: ø1.0, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: NPTF, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum

Nozzle Diameter: ø1.0, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch

Nozzle Diameter: ø0.7, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: NPTF, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum

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Air Cylinder MGQ Series Compact Guide Cylinder

These grcoves can b used for fnmly fixing the tying ba.ds or lad wis oi the auto switch, etc., dd also termiml boards, etc-, to the main body of the cylinder q " l-f9 -l lF'rg _1+T l---' l I I Detailed drawing ol part a Detailed drawing of part b Part a Patl a Ff"frf?

Air Cylinder CLA Series Fine Lock Model

t0 I Recommended Circuits I q+"'"' A,.r rr.nv . . . 1 1 I I I Construction/Parts List .12 l J l / 18-20 I nuto Switch Specif ications . .21 I nuto Switch Circuit Diagrams. .22 I Ruto Switch Dimensions/Operating Range .23 I Ruto Switch Connection . .24 I Ruto Switch MountinS. . .25 r"-"--'-""' I Annaccnriac I Pranar riinne .26 r "-"-" tri*,t l x}$x:? xxxs !

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t0 I Recommended Circuits I q+"'"' A,.r rr.nv . . . 1 1 I I I Construction/Parts List .12 l J l / 18-20 I nuto Switch Specif ications . .21 I nuto Switch Circuit Diagrams. .22 I Ruto Switch Dimensions/Operating Range .23 I Ruto Switch Connection . .24 I Ruto Switch MountinS. . .25 r"-"--'-""' I Annaccnriac I Pranar riinne .26 r "-"-" tri*,t l x}$x:? xxxs !

Pin Clamp Cylinder Series CKQ/CLKQ

3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4

CYV

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

Rodless Cylinder for Vacuum Series CYV ø15, ø32

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

ITV

Attachments B310T B410T T-bracket Y30 Y40 Spacer 234 Y30L Y40L Spacer with L-bracket Y30T Y40T Spacer with T-bracket qAF4000 wAFM4000 eITV3000 Modular Products and Accessory Combinations Applicable products and accessories Applicable model ITV20ll ITV30ll AF3000 AF4000 q Air filter w Mist separator e L-bracket r T-bracket t Spacer y Spacer with L-bracket u Spacer with T-bracket AFM3000 AFM4000

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

2 Phase Stepper Motor/Without Motor Brake Series LXP

Home position switch De-energized operating type 0.1 Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications LC6D-220AD-Q (Refer to page 306 details.) LC6D-507AD-Q (Refer to page 306 for details.) Applicable driver Holding plate: MB1(1 pc.), Phillips countersunk head screw M3 x 6l (1 pc.)

High Pressure Coolant Valve

) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56

MGQ

(mm) Eccentric distance l (mm) Eccentric distance l (mm) MGQM32 to 100 (Slide bearing) MGQL32 to 100(25, 50 stroke) 25 50 MGQL32 to 100-Over 50 stroke Load weight m (kg) Load weight m (kg) Eccentric distance l (mm) Eccentric distance l (mm) Eccentric distance l (mm) 8-20-7 8 Series MGQ Construction Series MGQL Series MGQM MGQL12 to 25 12 to 25/MGQM12 to 25 12, 16 Over 30 stroke Over 50 stroke

Nozzle Type Ionizer

ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model

Peltier-type Chiller Thermo-con/ Compact Type

) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine