180

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

NVEPA|VEFseies

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

CP95

F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size (mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145

CP95

6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

CRJ

L (Example) F9NL 5m .

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

L (Example) F9NL 5m .

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

VNB

Note) In the case of body options S and L, the materials of the part nos. e and r are as follows: (Example): VN1-A3BA However all brackets of valve element VNB 1 to 4 are made of stainless steel. (No need to add options S and L.)

Process Valve

VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Note) Electrical

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

ITVH

angle type cable connector Flat bracket Straight type cable connector L-bracket IR Dimensions IRV Flat bracket L-bracket VEX 100 10 7 15 SRH 25 4 x R3.5 52 40 2.3 33 (8.5) SRP 50 SRF 50 84 4 7 ITV 20 60 IC 70 12 1.6 ITVH ITVH ITVX Working Principle PVQ When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

MHC2, MHCA2, MHCM2 F L F MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S Pressure 0.6MPa 4 4 2 Pressure 0.6MPa 0.5 Pressure 0.6MPa Gripping force N Gripping force N Gripping force N 3 3 0.4 0.5 0.5 1 2 2 0.3 0.4 0.4 0.2 1 1 0.3 0 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 2 Series MHC2/MHCA2/MHCM2 Confirmation of inertial moment of attachment Step

Table of Contents

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of

Micro Mechanical Valve Series VM1000

3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Magnetic Separator FHM Series

Volume of fluid in tank: 200 L 2. Pump-out volume: 100 L/min 3. Contaminant concentration of used fluid: 500 ppm (initial concentration, percentage by volume) 4. Number of separators: 2 pcs.

Hand Valve Series VH

min)(ANR) Flow rate (l/min)(ANR) Flow rate (l/min)(ANR) VH600 Effective area S=194mm2 Supply pressure MPa 0.7 0.7 Valve output pressure (MPa) 0.6 0.6 0.5 0.5 0.4 0.4 0.2 0.3 0.3 0.2 0.1 0.1 10 15 0 5 Flow rate (l/min)(ANR) 3.6-7 Hand Valve Series VH Construction VH200 5 6 4 3 1 SlA 7 VlA 8 1 (P) SlA 4 (B) 2 (A) 2 3 (R) VlA VH300 / 400 5 6 VM/VR 4 3 VH 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600

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W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..